Junction field effect transistor (JFET) structure and methods to form same
AssigneeGlobalFoundries U.S. Inc.
InventorsQizhi Liu, Vibhor Jain, John J. Pekarik, Judson R. Holt
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AssigneeGlobalFoundries U.S. Inc.
InventorsQizhi Liu, Vibhor Jain, John J. Pekarik, Judson R. Holt
Estimating the term…
A junction field effect transistor (JFET) structure includes a doped polysilicon gate over a channel region of a semiconductor layer. The doped polysilicon gate has a first doping type. A raised epitaxial source is on the source region of the semiconductor layer and adjacent a first sidewall of the doped polysilicon gate, and has a second doping type opposite the first doping type. A raised epitaxial drain is on the drain region of the semiconductor layer and adjacent a second sidewall of the doped polysilicon gate, and has the second doping type. A doped semiconductor region is within the channel region of the semiconductor layer and extending from the source region to the drain region, and a non-conductive portion of the semiconductor layer is within the channel region to separate the doped semiconductor region from the doped polysilicon gate.
A junction field effect transistor (JFET) structure, comprising:
Dependencies are inferred from the claim text.