Vibration device and method for controlling the same

A method for controlling a vibration device,

• the vibration device comprising:
• a movable body capable of vibrating in a first direction and a second direction perpendicular to the first direction;
• a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction;
• and
• a detection mechanism that detects a predetermined physical quantity based on an amplitude of vibration in the second direction of the movable body based on a Coriolis force acting on the movable body that freely vibrates in the first direction,
• the method comprising:
• releasing the caught movable body to freely vibrate the movable body in the first direction by using the catch and release mechanism;
• and
• catching the movable body freely vibrating in the first direction by using the catch and release mechanism,
• wherein the catch and release mechanism is applied with an only increasing applied voltage when catching the movable body, and the applied voltage satisfies tc te,
• where tc is a time from a rise start time point to a rise end time point of the applied voltage for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, and to is a time from a fall start time point to a fall end time point during an applied voltage for releasing the movable body caught by the catch and release mechanism to freely vibrate the movable body in the first direction.

A method for controlling a vibration device,

• the vibration device comprising:
• a movable body capable of vibrating in a first direction;
• and
• a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction,
• the method comprising:
• releasing the caught movable body to freely vibrate the movable body in the first direction by using the catch and release mechanism;
• and
• catching the movable body freely vibrating in the first direction by using the catch and release mechanism,
• wherein the catch and release mechanism is applied with an applied voltage when catching the movable body, and the applied voltage satisfies Vcmin/td>ΔV/Δt,
• where Vcmin is a minimum voltage necessary for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, td is a period of the free vibration in the first direction of the movable body, and ΔV/Δt is an increasing rate of an applied voltage at a moment when the minimum voltage Vcmin is applied between the catch and release mechanism and the movable body.