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US 11,092,245 B2Granted
Chamber valve
AssigneeGeneral Plasma, Inc.
InventorJohn E. Madocks
Life of this patent
Estimating the term…
Abstract
A chamber valve (100) for use in processes requiring vacuum pressures has a compact design which minimizes the space needed for the valve in the travel direction. The chamber valve gate (116) is moveable between a first position in which the gate is offset from the portal (110), and a second position in which the gate is aligned with the portal. The gate will move into alignment with the portal while remaining within a plane parallel or nearly parallel to the portal.
Claims14
A chamber valve, comprising:
- a frame extending around an elongate portal;
- a gate operably connected to the frame, wherein the gate is moveable between:
- a first position in which the gate is offset from the portal, and
- a second position in which the gate is aligned with the portal;
- a swing arm extending between the frame and the gate;
- a first joint at which the swing arm is rotatably connected to the frame;
- a second joint at which the swing arm is rotatably connected to the gate;
- and
- a single drive mechanism operably connected to the gate;
- wherein:
- the gate shifts laterally and diagonally relative to the portal to move between the first and second positions;
- the single drive mechanism is configured to transfer force to the gate to move the gate between the first and second positions;
- the gate moves between the first and second positions along an arcuate path having a radius corresponding to a length of the swing arm between the first and second joints;
- and
- when or after the gate is in the second position, the single drive mechanism is further configured to transfer force to the gate to seal the gate around the elongate portal.
12 more elements
A chamber valve, comprising:
- a frame extending around an elongate portal;
- a gate operably connected to the frame;
- a swing arm extending between the frame and the gate;
- a first joint at which the swing arm is rotatably connected to the frame;
- a second joint at which the swing arm is rotatably connected to the gate;
- and
- a single drive mechanism operably connected to the gate;
- wherein:
- the gate is moveable between:
- a first position in which the gate is offset from the portal, and
- a second position in which the gate is aligned with the portal;
- the gate shifts laterally and diagonally relative to the portal to move between the first and second positions;
- the single drive mechanism is configured to transfer force to the gate to move the gate between the first and second positions;
- and
- when or after the gate is in the second position, the single drive mechanism is further configured to transfer force to the gate to seal the gate around the elongate portal;
- the gate includes:
- a sealing plate having a first major surface facing toward the portal when the gate is in the second position, and an opposite second major surface,
- a spring plate parallel to the sealing plate and further from the portal than the sealing plate when the gate is in the second position, and
- a plurality of rockers, wherein individual rockers of the plurality of rockers are spaced apart along a length of the gate;
- before the gate is in the second position, the single drive mechanism is configured to exert a first force against the gate via the spring plate to move the gate along a path extending between the first and second positions;
- the frame includes a stop that resists further movement of the sealing plate along the path while the gate is in the second position;
- and
- when or after the gate is in the second position, the plurality of rockers transfers a second force exerted against the gate by the single drive mechanism to the sealing plate via the spring plate to move the sealing plate toward the portal and away from the spring plate.
20 more elements
Dependencies are inferred from the claim text.