Microelectromechanical device having a structure tiltable through an actuation of the piezoelectric type

A portable electronic apparatus, comprising:

• a projective apparatus comprising:
• a light source configured to generate a light beam;
• and
• a microelectromechanical device configured to receive said light beam and optically coupled to a screen so as to direct said light beam onto the screen;
• wherein said microelectromechanical device comprises:
• a body of semiconductor material, which forms a cavity;
• a mobile structure;
• and
• an actuation structure, including a first spirally shaped deformable element, which faces the cavity and has an external end mechanically coupled to the body, and a piezoelectric-actuation system configured to be controlled so as to deform said first spirally shaped deformable element and cause a consequent rotation of the mobile structure;
• wherein said mobile structure comprises a supporting region and a first pillar region, said supporting region carrying a tiltable element, said first pillar region being mechanically coupled to an internal end of said first spirally shaped deformable element, said supporting region being arranged on top of the first pillar region and overlying at least part of said first spirally shaped deformable element;
• and
• wherein said mobile structure further comprises a reflecting region arranged on the supporting region.

A microelectromechanical device, comprising:

• a body of semiconductor material, which forms a cavity;
• a mobile structure;
• and
• an actuation structure including:
• a first spirally shaped deformable element which faces the cavity and has an external end mechanically coupled to the body;
• a first piezoelectric-actuation system configured to be controlled so as to deform said first spirally shaped deformable element and cause rotation of the mobile structure;
• a second deformable element which is laterally staggered with respect to the first spirally shaped deformable element and is mechanically coupled to the body and to the mobile structure;
• and
• a second piezoelectric-actuation system configured to be controlled so as to deform said second deformable element and contribute to causing rotation of the mobile structure;
• wherein said mobile structure comprises:
• a first pillar region, said first pillar region being mechanically coupled to an internal end of said first spirally shaped deformable element;
• a second pillar region, said second pillar region being mechanically coupled to said second deformable element;
• and
• a supporting region being arranged on top of the first and second pillar regions and overlying at least part of said first spirally shaped deformable element and said second deformable element, said supporting region carrying a tiltable element.