Strain gauge sensor accelerometer with improved accuracy

An MEMS or NEMS accelerometer adapted to measure an acceleration along a sensing axis comprising:

• a substrate featuring a plane;
• a mass having a central zone and suspended relative to the substrate;
• a single lever arm forming a mass force amplification structure, comprising:
• a first end connected to the substrate by means of a first connection adapted to allow rotation of the lever arm about a rotation axis perpendicular to the sensing axis, and
• a second end connected to the mass by means of a second connection adapted to transmit a movement in translation of the mass to the lever arm whilst allowing rotation of said lever arm about the rotation axis;
• the second end of the lever arm being disposed at a level of the central zone of the mass;
• further comprising at least one strain gauge, said gauge being connected to the lever arm, each gauge comprising:
• a first end connected to the substrate, and
• a second end connected to the lever arm,
• the second connection comprising a main coupling blade rigid along the sensing axis and flexible about the rotation axis of the lever arm.