Joined body of piezoelectric material substrate and support substrate
AssigneeNGK Insulators, Ltd.
InventorsYuji Hori, Tatsuro Takagaki
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Abstract
A bonded body includes a supporting substrate; a piezoelectric material substrate composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate; and a bonding layer bonding the supporting substrate and the piezoelectric material substrate and contacting a main surface of the piezoelectric material substrate. The bonding layer includes a void extending from the piezoelectric material substrate toward the supporting substrate. A ratio (t2/t1) of a width t2 at an end of the void on a side of the supporting substrate with respect to a width t1 at an end of the void on a side of the piezoelectric material substrate is 0.8 or lower.
Claims8
A bonded body comprising:
- a supporting substrate;
- a piezoelectric material substrate comprising a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate;
- and
- a bonding layer bonding said supporting substrate and said piezoelectric material substrate and contacting a main surface of said piezoelectric material substrate,
- wherein said bonding layer comprises a void extending from said piezoelectric material substrate toward said supporting substrate, and
- wherein a ratio t2/t1 of a width t2 at an end of said void on a side of said supporting substrate with respect to a width t1 at an end of said void on a side of said piezoelectric material substrate is greater than zero and no more than 0.8.
Dependencies are inferred from the claim text.