Optical element moving apparatus, narrowed-line laser apparatus, and method for manufacturing electronic device

An optical element moving apparatus comprising:

• a first holder configured to hold a first optical element;
• a second holder configured to hold a second optical element and having an inclined surface that is inclined with respect to a first direction directed from the second holder to the first holder;
• a guide section configured to be capable of moving the second holder in a direction parallel to the first direction;
• and
• an elastic member disposed in a position which is located between the first holder and the second holder and on a first plane intersecting the inclined surface at right angles and being parallel to the first direction,
• wherein at least a part of the guide section is disposed on the first plane,
• the guide section includes a first rail and a second rail held by the first holder,
• the second holder includes a first section that moves along the first rail and a second section that moves along the second rail, and
• the second optical element is held between the first section and the second section.