Laser light energy and dose control using repetition rate based gain estimators
AssigneeCymer, Inc.
InventorsYingbo Zhao, Kevin O'Brien
Life of this patent
Estimating the term…
Abstract
A laser system's laser light energy control and resulting dose control is improved by creating and using a set of gain estimators, one for each of a set or range of laser light pulse repetition rates. When a new repetition rate is used, its corresponding gain estimator is retrieved, used to compute the voltage to fire the laser source, and updated. The resulting generated laser light thereby avoids the convergence delay inherent in prior laser systems and, further, can repeatedly do so with subsequent specified repetition rates.
Claims8
A method of laser light energy control comprising:
- receiving, in a laser system controller, a first laser trigger command and a voltage command;
- converting, by the laser system controller, the voltage command to a first energy target;
- determining, by the laser system controller, a first laser repetition rate based on a difference between the first laser trigger command and a previous laser trigger command;
- retrieving, by the laser system controller, a first repetition rate gain estimator corresponding to the first laser repetition rate;
- determining, by the laser system controller, a first laser voltage using the first energy target and the first repetition rate gain estimator;
- directing, by the laser system controller, a laser source to fire using the first laser voltage;
- receiving, in the laser system controller, a subsequent laser trigger command and a subsequent voltage command;
- converting, by the laser system controller, the subsequent voltage command to a second energy target;
- determining, by the laser system controller, a second laser repetition rate based on a difference between the subsequent laser trigger command and the first laser trigger command, wherein the second laser repetition rate is different than the first laser repetition rate;
- retrieving, by the laser system controller, a second repetition rate gain estimator corresponding to the second laser repetition rate;
- determining, by the laser system controller, a second laser voltage using the second energy target and the second repetition rate gain estimator;
- and,
- directing, by the laser system controller, the laser source to fire using the second laser voltage.
A laser system for laser light energy control comprising:
- a laser system controller configured to:
- receive a first laser trigger command and a voltage command;
- convert the voltage command to a first energy target;
- determine a first laser repetition rate based on a difference between the first laser trigger command and a previous laser trigger command;
- retrieve a first repetition rate gain estimator corresponding to the first laser repetition rate;
- determine a first laser voltage using the first energy target and the first repetition rate gain estimator;
- direct a laser source to fire using the first laser voltage;
- receive a subsequent laser trigger command and a subsequent voltage command;
- convert the subsequent voltage command to a second energy target;
- determine a second laser repetition rate based on a difference between the subsequent laser trigger command and the first laser trigger command, wherein the second laser repetition rate is different than the first laser repetition rate;
- retrieve a second repetition rate gain estimator corresponding to the second laser repetition rate;
- determine a second laser voltage using the second energy target and the second repetition rate gain estimator;
- and,
- direct the laser source to fire using the second laser voltage.
Dependencies are inferred from the claim text.