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US 11,081,845 B2Granted
Vacuum pump, and connector and control device applied to vacuum pump
AssigneeEdwards Japan Limited
InventorsYanbin Sun, Kengo Saegusa, Yoshiyuki Sakaguchi, Hideki Omori
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Abstract
A vacuum pump has a hermetic connector disposed on a base of a body of the vacuum pump. The hermetic connector has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body. The connector is longer in a lateral direction than in an axial direction so that the connector is horizontally long in a circumferential direction of the pump body.
Claims7
A vacuum pump, comprising:
- a connector that is disposed on a side portion of a base portion of a pump body and has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body,
- wherein a surface of the connector through which the plurality of pins extend in a radial direction is longer in a lateral direction than in an axial direction of the pump body, and
- wherein the lateral direction and the radial direction are perpendicular to the axial direction,
- a substrate for electrical connection is fixed to atmosphere-side end portions of the plurality of pins, and
- the substrate is formed by a wiring pattern having a multilayer structure in a thickness direction.
2 more elements
Dependencies are inferred from the claim text.