Back to results
US 11,081,810 B2Granted
TFT substrate and scanned antenna having TFT substrate
AssigneeSharp Kabushiki Kaisha
InventorKatsunori Misaki
Life of this patent
Estimating the term…
Abstract
A TFT substrate includes a dielectric substrate, a plurality of antenna element regions provided on the dielectric substrate, each antenna element region including a TFT and a patch electrode electrically connected to a drain electrode of the TFT, and a flattening layer provided on the dielectric substrate, located above a layer including the patch electrode, and formed of a resin.
Claims18
A TFT (thin film transistor) substrate comprising:
- a dielectric substrate;
- a plurality of antenna element regions provided on the dielectric substrate, each antenna element region including a TFT and a patch electrode electrically connected to a drain electrode of the TFT, the TFT including a gate electrode, a semiconductor layer, a gate insulating layer located between the gate electrode and the semiconductor layer, and a source electrode and the drain electrode electrically connected to the semiconductor layer;
- and
- a flattening layer provided over the dielectric substrate, located above a layer including the patch electrode, and formed of a resin,
- wherein the flattening layer does not overlap with at least a portion of the patch electrode as viewed in a direction normal to the dielectric substrate.
2 more elements
A TFT (thin film transistor) substrate comprising:
- a dielectric substrate;
- a plurality of antenna element regions provided on the dielectric substrate, each antenna element region including a TFT and a patch electrode electrically connected to a drain electrode of the TFT;
- and
- a flattening layer provided over the dielectric substrate, located above a layer including the patch electrode, and formed of a resin,
- wherein a difference in height between an upper surface of the flattening layer and an upper surface of the patch electrode is 500 nm or less.
2 more elements
Dependencies are inferred from the claim text.