Scanned antenna and method of inspecting scanned antenna

A scanning antenna including a transmission and/or reception region including a plurality of antenna units arranged in the transmission and/or reception region and a non-transmission and/or reception region located in a region other than the transmission and/or reception region, the scanning antenna comprising:

• a thin film transistor (TFT) substrate including a first dielectric substrate, a plurality of TFTs supported by the first dielectric substrate, a plurality of gate bus lines, a plurality of source bus lines, and a plurality of patch electrodes, the plurality of TFTs and the plurality of patch electrodes being each disposed corresponding to the plurality of antenna units;
• a slot substrate including a second dielectric substrate and a slot electrode provided on a first main surface of the second dielectric substrate;
• a liquid crystal layer provided between the TFT substrate and the slot substrate;
• and
• a reflective conductive plate disposed opposing a second main surface of the second dielectric substrate, the second main surface being located on a side opposite to the first main surface, with a dielectric layer interposed between the reflective conductive plate and the second dielectric substrate,
• wherein the slot electrode includes a plurality of slots disposed corresponding to the plurality of patch electrodes and a solid portion not including the plurality of slots,
• when viewed from a normal direction of the first dielectric substrate, in each of the plurality of antenna units, a patch electrode of the plurality of patch electrodes is disposed across a slot of the plurality of slots in a first direction and overlaps the solid portion at both ends of the slot,
• at least one antenna unit of the plurality of antenna units further includes a transparent electrode in contact with one electrode of the solid portion and the patch electrode and thinner than the one electrode, and
• when viewed from a normal direction of the first dielectric substrate, the transparent electrode does not overlap the one electrode and includes an alignment controlled region overlapping the other electrode with the liquid crystal layer interposed between the transparent electrode and the other electrode.