Apparatuses including electrodes having a conductive barrier material and methods of forming same
AssigneeMicron Technology, Inc.
InventorsSwapnil A. Lengade, John M. Meldrim, Andrea Gotti
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Abstract
Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.
Claims11
A method, comprising:
- partitioning an electrode disposed between a switch and a phase change memory storage element into first and second portions;
- and
- forming an electrically conductive barrier material between the first and second portions of the electrode, wherein at least one portion of the electrically conductive barrier material has a larger cross section than at least one of the first or second portions of the electrode.
A method, comprising:
- forming a switch;
- forming a phase change material storage element;
- and
- forming an electrically conductive barrier material between the switch and the phase change material storage element, wherein forming the electrically conductive barrier material between the switch and phase change material comprises:
- forming in situ the electrically conductive barrier material, a first electrode, and a second electrode.
A method, comprising:
- forming a switch;
- forming a phase change material storage element;
- and
- forming an electrically conductive barrier material between the switch and the phase change material storage element, wherein forming the electrically conductive barrier material between the switch and phase change material comprises:
- forming in situ the electrically conductive barrier material, a first electrode, and a second electrode, wherein the first electrode is disposed between at least a portion of the switch and the electrically conductive barrier material, and wherein the second electrode is disposed between at least a portion of the phase change material storage element and the electrically conductive barrier material.
Dependencies are inferred from the claim text.