Piezoelectric element manufacturing method
AssigneeKonica Minolta, Inc.
InventorsKazunari Tada, Naoki Shimizu
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Abstract
The present invention provides a piezoelectric element manufacturing method. The manufacturing method is a method of manufacturing a piezoelectric element comprising a piezoelectric body composite in which a piezoelectric body configured from a Pb-based piezoelectric material and a resin are alternately arranged, and comprises a step of etching, using an etching liquid, a plurality of parallel piezoelectric body segments formed by dicing. The etching liquid comprises a liquid which contains 0.1 to 20 mass % of hexafluorosilicic acid.
Claims13
A method for producing a piezoelectric element comprising a piezoelectric composite, the piezoelectric composite having piezoelectric bodies made of a Pb-based piezoelectric material and resinous bodies alternately arranged, the method comprising:
- etching a plurality of aligned piezoelectric segments formed by dicing with an etchant, wherein
- a liquid containing 0.1 to 20 mass % of hexafluorosilicic acid is used as the etchant;
- wherein
- each piezoelectric segment of the plurality of piezoelectric segments has a taper extending in a direction from a first end toward a second end of the piezoelectric segment, the second end being opposite to the first end, and
- the etching comprises:
- a first etching in which the plurality of piezoelectric segments are etched by causing the etchant to flow relative to the piezoelectric segments in such a manner that the concentration of the etchant is constant between first ends and second ends of the piezoelectric segments;
- and
- a second etching in which the plurality of piezoelectric segments are etched under a condition where the concentration of the etchant is higher around the first ends than around the second ends of the piezoelectric segments.
Dependencies are inferred from the claim text.