Method for producing a CdTe solar cell
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsDaniel Hirsch, Olaf Zywitzki, Thomas Modes, Torsten Werner, Torsten Kopte, Christoph Metzner
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Abstract
A method for producing a CdTe solar cell is provided, wherein at least the following layers are deposited on a glass substrate within a vacuum chamber: a TCO layer acting as a frontal contact; at least one CdTe layer; a thin layer of a chlorine-containing compound, and an electrically conductive layer acting as a return contact. Here, a maximally 20 nm thick passivation layer made from CdS, in which chemically non-bound oxygen is embedded, is deposited on the TCO layer prior to deposition of at least one CdTe-layer.
Claims2
A method for producing a CdTe solar cell, the method comprising:
- depositing at least the following layers on a glass substrate:
- a TCO layer acting as a front contact;
- at least one CdTe layer;
- a thin layer of a chlorine-containing compound;
- and an electrically conductive layer acting as back contact, wherein before the deposition of the at least one CdTe layer, a passivation layer with a maximum thickness of 20 nm is deposited by sublimation of CdS, wherein the CdS used for depositing the passivation layer is thermally heated until it sublimates, and the passivation layer is deposited in the presence of an oxygen plasma, the passivation layer comprising CdS in which chemically non-bound oxygen is embedded.
Dependencies are inferred from the claim text.