Method for producing a graphene-based sensor
AssigneeInfineon Technologies AG
InventorsChristoph Glacer, Stephan Pindl, Werner Weber, Sebastian Wittmann
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Abstract
In accordance with an embodiment, a method for producing a graphene-based sensor includes providing a carrier substrate; forming a carrier structure on the carrier substrate, wherein one or more separating structures are formed on an upper side of the carrier structure; and performing a wet chemical transfer of a graphene layer onto the upper side of the carrier structure that comprises the separating structures, where the separating structures and a tear strength of the graphene layer are matched to one another such that the graphene layer respectively tears at the separating structures during the wet chemical transfer.
Claims19
A method for producing a graphene-based sensor, comprising:
- providing a carrier substrate;
- forming a carrier structure on the carrier substrate, wherein one or more separating structures are formed on an upper side of the carrier structure;
- and
- performing a wet chemical transfer of a graphene layer onto the upper side of the carrier structure that comprises the separating structures,
- wherein the graphene layer is positioned above the separating structures and a tear strength is applied to the graphene layer such that the graphene layer respectively tears at the separating structures during the wet chemical transfer.
A method for producing a graphene-based sensor, comprising:
- forming a carrier structure comprising a separating structure;
- pre-stressing the carrier structure with a tensile stress;
- forming a graphene layer over the carrier structure after forming the carrier structure, forming the graphene layer comprising performing a wet chemical transfer;
- and
- tearing the graphene layer over the separating structure, wherein tearing the graphene layer occurs during the wet chemical transfer.
Dependencies are inferred from the claim text.