Nonvolatile memory device and method for fabricating the same

A nonvolatile memory device comprising:

• a substrate;
• an interlayer insulating layer on the substrate;
• a bit line extending in a first direction, in the interlayer insulating layer;
• a mold structure comprising a plurality of insulating patterns and a plurality of gate electrodes alternately stacked on the interlayer insulating layer;
• a channel structure penetrating the mold structure and connected to the bit line;
• and
• a source structure in contact with an upper part of the channel structure on the mold structure,
• wherein the source structure comprises a first impurity pattern which overlaps a first region of the channel structure, a second impurity pattern which overlaps a second region of the channel structure, and a separation pattern which overlaps a third region of the channel structure and separates the first impurity pattern from the second impurity pattern.

A nonvolatile memory device comprising:

• a substrate;
• a peripheral circuit structure on the substrate;
• a bit line extending in a first direction on the peripheral circuit structure;
• a mold structure comprising a plurality of insulating patterns and a plurality of gate electrodes alternately stacked on the bit line;
• a plurality of channel structures penetrating the mold structure, wherein lower parts of each of the channel structures are connected to the bit line;
• and
• a source structure connected to upper parts of each of the channel structures on the mold structure,
• wherein the source structure comprises a first impurity pattern overlapping a first region of each of the channel structures, a second impurity pattern overlapping a second region of each of the channel structures, and a separation pattern which overlaps a third region of each of the channel structures and separates the first impurity pattern and the second impurity pattern,
• wherein the first impurity pattern comprises an n-type impurity, and
• wherein the second impurity pattern comprises a p-type impurity.