Semiconductor structure, capacitor structure thereof and manufacturing method of the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChin-Shan Wang, Yi-Miaw Lin
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Abstract
The present disclosure provides a semiconductor structure, including: a transistor, including a gate structure and a source/drain structure; a source/drain contact, disposed over the source/drain structure; a gate contact, disposed over the gate structure; and a conductive bridge, disposed over the transistor, wherein the conductive bridge overlaps the source/drain contact from a top view perspective and electrically connecting the gate contact. The present disclosure also provides a method for forming the same.
Claims20
A semiconductor structure, comprising:
- transistor, including a gate structure and a source/drain structure;
- a source/drain contact, disposed over the source/drain structure;
- a gate contact, disposed over the gate structure;
- and
- a conductive bridge, disposed over the transistor, wherein the conductive bridge overlaps the source/drain contact from a top view perspective and electrically connecting the gate contact.
A semiconductor structure, comprising:
- a first transistor;
- a first conductive plug, electrically connecting a first source drain/structure of the first transistor;
- a second conductive plug, electrically connecting a first gate structure of the first transistor;
- a conductive bridge, electrically connecting the second conductive plug;
- and
- a first capacitor, disposed over the transistor, wherein the first capacitor includes portion of the first conductive plug and a portion of the conductive bridge.
A semiconductor structure, comprising:
- a transistor, including a gate structure and a source/drain structure:
- a source/drain contact, disposed over the source/drain structure:
- a gate contact, disposed over the gate structure;
- and a conductive bridge, disposed over the transistor, and a bottom of the conductive bridge is spaced from a top of the source/drain contact by a dielectric layer.
Dependencies are inferred from the claim text.