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US 11,081,391 B2Granted
Wafer level dicing method and semiconductor device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYing-Ju Chen, Hsien-Wei Chen
Life of this patent
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Abstract
A semiconductor device includes a plurality of connectors and at least one insulating layer disposed over a semiconductor substrate. A molding layer extends around the plurality of connectors. A sidewall of the molding layer that is closest to a scribe line is offset from the scribe line.
Claims20
A semiconductor device, comprising:
- a substrate;
- a contact pad disposed on the substrate;
- a plurality of conductive lines disposed over the substrate, a first conductive line of the plurality of conductive lines being electrically connected to the contact pad;
- a first insulating layer disposed over the plurality of conductive lines;
- a second insulating layer directly under the plurality of conductive lines, wherein the first insulating layer extends along a sidewall of the second insulating layer;
- a passivation layer under the second insulating layer;
- a first connector disposed over the first conductive line;
- a second connector disposed over the first insulating layer next to the first connector;
- and
- a first molding compound disposed over the first insulating layer around the first connector, the first connector extending beyond a surface of the first molding compound that is farthest from the substrate;
- and
- a second molding compound disposed over the first insulating layer around the second connector, the second connector extending beyond a surface of the second molding compound that is farthest from the substrate, wherein the first molding compound is physically separate from the second molding compound, wherein the second molding compound and the first insulating layer each contact a top surface of the passivation layer, wherein the second molding compound extends below a bottommost surface of the first molding compound.
9 more elements
A device, comprising:
- a substrate;
- a first insulating layer disposed over the substrate;
- a passivation layer under the first insulating layer;
- a plurality of conductive lines disposed over the first insulating layer;
- a second insulating layer disposed over the first insulating layer, wherein the second insulating layer extends along a sidewall of the first insulating layer;
- a plurality of connectors disposed over the second insulating layer, wherein each of the plurality of connectors is electrically connected to a conductive line of the plurality of conductive lines;
- and
- a molding layer over the second insulating layer, the molding layer surrounding each of the plurality of connectors, wherein a gap separates a first portion of the molding layer from a second portion of the molding layer, the gap exposes a top surface of the second insulating layer, the first portion of the molding layer surrounding a first connector of the plurality of connectors, the second portion of the molding layer surrounding a second connector of the plurality of connectors, the first insulating layer and the molding layer each contacting a top surface of the passivation layer, and wherein the second portion of the molding layer extends below a bottommost surface of the first portion of the molding layer.
5 more elements
A device comprising:
- a contact pad of a semiconductor die;
- a first conductive line electrically connected to the contact pad;
- a second conductive line adjacent the first conductive line;
- a first insulating layer over the first conductive line and the second conductive line;
- a second insulating layer directly under the first conductive line and the second conductive line, and wherein the first insulating layer extends along a sidewall of the second insulating layer;
- a passivation layer under the second insulating layer;
- a first solder region electrically connected to the first conductive line;
- a second solder region electrically connected to the second conductive line;
- a first molding compound over the first insulating layer and disposed around the first solder region;
- and
- a second molding compound over the first insulating layer and disposed around the second solder region, wherein a top surface of the first insulating layer is exposed between the first molding compound and the second molding compound, and wherein the second molding compound and the first insulating layer each contact a top surface of the passivation layer, and wherein the second molding compound extends below a bottommost surface of the first molding compound.
8 more elements
Dependencies are inferred from the claim text.