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US 11,081,383 B2Granted
Substrate table with vacuum channels grid
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMin-Cheng Wu, Chi-Hung Liao
Life of this patent
Estimating the term…
Abstract
A substrate table is provided. The substrate table includes a main body configured to support a substrate thereon. The substrate table further includes a number of vacuum channels provided in the main body and respectively formed with a vacuum opening on a surface of the main body. The vacuum channels are configured to apply a vacuum to the substrate. The vacuum channels are distributed throughout the main body and arranged in a grid pattern.
Claims20
A substrate table, comprising:
- a main body configured to support a substrate thereon;
- a plurality of vacuum channels provided in the main body and respectively formed with a vacuum opening on a surface of the main body, configured to apply a vacuum to the substrate, wherein the vacuum channels are distributed evenly in all regions of the main body and arranged in a grid pattern, and the spacing between each adjacent vacuum channels is consistent, wherein the all regions of the main body comprise a central region and a periphery region connected to the central region and close to an edge of the main body;
- and
- a plurality of gas supply channels provided in the main body and respectively formed with a gas supply opening on the surface, configured to supply a gas to the substrate,
- wherein the surface of the main body has a plurality of burls extending therefrom, and
- wherein the gas supply channels are formed between the burls and between the vacuum channels.
3 more elements
A substrate table system, comprising:
- a substrate table, comprising:
- a main body configured to support a substrate thereon;
- and
- a plurality of vacuum channels provided in the main body and respectively formed with a vacuum opening on the surface of the main body, configured to apply a vacuum to the substrate, wherein the vacuum channels are distributed evenly in all regions of the main body and arranged in a grid pattern, and the spacing between each adjacent vacuum channels is consistent, wherein the all regions of the main body comprise a central region and a periphery region connected to the central region and close to an edge of the main body;
- a first pressure control module configured to independently control a vacuum pressure in each vacuum channel;
- a plurality of gas supply channels provided in the main body and respectively formed with a gas supply opening on the surface of the main body, configured to supply a gas to the substrate, wherein the gas supply channels are formed between the vacuum channels;
- and
- a second pressure control module configured to independently control a gas supply pressure in each gas supply channel.
5 more elements
A substrate table system, comprising:
- a substrate table, comprising:
- a main body configured to support a substrate thereon;
- a plurality of vacuum channels provided in the main body and respectively formed with a vacuum opening on a surface of the main body, configured to apply a vacuum to the substrate, wherein the vacuum channels are distributed evenly in all regions of the main body and arranged in a grid pattern, and the spacing between each adjacent vacuum channels is consistent, wherein the all regions of the main body comprise a central region and a periphery region connected to the central region and close to an edge of the main body;
- a plurality of gas supply channels provided in the main body and respectively formed with a gas supply opening on the surface, configured to supply a gas to the substrate, wherein the gas supply channels are distributed throughout the main body and formed between the vacuum channels;
- and
- a plurality of burls extending from the surface of the main body, and arranged throughout the main body, configured to support the substrate;
- and
- a pressure control module configured to independently control a vacuum pressure in each vacuum channel,
- wherein the vacuum channels and the gas supply channels are formed between the burls and are alternatively arranged.
6 more elements
Dependencies are inferred from the claim text.