Substrate processing apparatus, transfer module, and coupling module

A transfer module for transferring a substrate in a substrate processing apparatus including a first processing module, said first processing module having a first specified processing unit that performs specified processing on said substrate and having a first delivery part that temporarily holds said substrate supplied from a supplying place, said first delivery part facing to said supplying place in a first direction, said transfer module comprising:

• a first transfer apparatus that unloads said substrate out of said first delivery part in a second direction opposite to said first direction and loads said substrate to said first specified processing unit from a loading place, said first specified processing unit facing to said loading place in said second direction, said first processing module facing to said first transfer apparatus in said second direction;
• a frame that defines a placement space in which said first transfer apparatus is placed;
• a first floor disposed inside said placement space, a base portion of said first transfer apparatus being installed on said first floor;
• a second floor disposed inside said placement space, a direction from said first floor to said second floor being defined as a third direction, said third direction being a horizontal direction orthogonal to said second direction;
• and
• a gateway that communicates, on said second floor, said placement space with an outside of said frame.

A coupling module provided in a substrate processing apparatus that processes a substrate, comprising:

• a first processing module that processes said substrate supplied from a first directional side;
• and
• a transfer module coupled to said first processing module on a second directional side opposite to said first directional side,
• wherein
• said first processing module has
• a first specified processing unit that performs specified processing on said substrate, and
• a first delivery part that temporarily holds said substrate, and said transfer module has
• a first transfer apparatus that unloads said substrate out of said first delivery part to said second directional side and loads said substrate into said first specified processing unit from said second directional side,
• and wherein
• said transfer module includes
• a frame that defines a placement space in which said first transfer apparatus is placed,
• a first floor being disposed inside said placement space, a base portion of said first transfer apparatus being installed on said first floor,
• a second floor disposed on a third directional side with respect to said first floor inside said placement space, a direction from said first floor to said second floor being defined as a third direction, said third direction being a horizontal direction orthogonal to said first direction, and
• a gateway that communicates, on said second floor, said placement space with an outside of said frame.