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US 11,081,363 B2Granted
Guard ring structure of semiconductor arrangement
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSheng-Fang Cheng, Chen-Chih Wu, Chien-Yuan Lee, Yen-Lin Liu
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Abstract
Among other things, one or more semiconductor arrangements and techniques for forming such semiconductor arrangements are provided. A semiconductor arrangement comprises a first guard ring surrounding at least a portion of a device, and a first poly layer formed over the first guard ring.
Claims20
A method for forming a semiconductor arrangement, comprising:
- forming a first guard ring to surround a device;
- forming a first poly structure and a second poly structure over the first guard ring, wherein a longest dimension of the first poly structure and a longest dimension of the second poly structure extend in a first direction;
- and
- forming a first metal structure between the first poly structure and the second poly structure, wherein a longest dimension of the first metal structure extends in the first direction.
1 more element
A semiconductor arrangement, comprising:
- a first guard ring surrounding a device;
- a first poly structure and a second poly structure over the first guard ring, wherein a longest dimension of the first poly structure and a longest dimension of the second poly structure extend in a first direction;
- and
- a first metal structure between the first poly structure and the second poly structure, wherein a longest dimension of the first metal structure extends in the first direction.
1 more element
A method for forming a semiconductor arrangement, comprising:
- forming a first guard ring;
- forming a first poly structure and a second poly structure over the first guard ring, wherein a longest dimension of the first poly structure and a longest dimension of the second poly structure extend in a first direction;
- and
- forming a first metal structure over the first poly structure and the second poly structure, wherein a longest dimension of the first metal structure extends in a second direction different than the first direction.
1 more element
Dependencies are inferred from the claim text.