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US 11,081,325 B2Granted
Conductive target material
AssigneesPlansee SE, Plansee Composite Materials GmbH
InventorsPeter Polcik, Enrico Franzke, Marcus Wolff
Life of this patent
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Abstract
The present invention relates to a conductive target material comprising essentially one lithium compound, preferably lithium phosphate, and carbon, and also typical impurities. The invention further relates to a process for producing a conductive target material and to the use thereof.
Claims5
A conductive target material, consisting of:
- lithium phosphate (Li3PO4), wherein said lithium phosphate (Li3PO4) assumes a proportion of greater than or equal to 80% by area on a cut surface of total area of a single conductive target material;
- carbon occurring predominantly with a proportion of greater than 99% of the carbon being graphite and has a proportion of said carbon between 3 and 20 at %;
- and
- lithium carbonate (Li2CO3);
- wherein the lithium phosphate (Li3PO4) and the carbon form a biphasic microstructure, with the lithium carbonate (Li2CO3) being present in a small proportion that is not regarded as a further phase in relation to the biphasic microstructure;
- and
- typical impurities to form said single conductive target material for the deposition of a lithium ion electrolyte layer by a DC or pulsed DC sputtering process, wherein said single conductive target material has a relative density of at least 95%.
4 more elements
Dependencies are inferred from the claim text.