Integrated transmission electron microscope
AssigneeNational Technology & Engineering Solutions of Sandia, LLC
InventorsKatherine L. Jungjohann, Khalid M. Hattar
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Abstract
An integrated transmission electron microscope comprising multiple electron sources for tuned beams of ultrafast, scanning probe, and parallel illumination in varied beam energies can be alternated within sub-microseconds onto a sample with dynamic ‘transient state’ processes to acquire atomic-scale structural/chemical data with site specificity. The various electron sources and condenser optics enable high-resolution imaging, high-temporal resolution imaging, and chemical imaging, using fast-switching magnets to direct the different electron beams onto a single maneuverable objective pole piece where the sample resides. Such multimodal in situ characterization tools housed in a single microscope have the potential to revolutionize materials science.
Claims4
An integrated transmission electron microscope, comprising:
- an electron illumination system, comprising
- at least two electron sources with associated condenser lenses, each providing a separate electron beam, and
- an incident beam electrostatic deflector to direct one of the electron beams to illuminate an electron-transparent sample and deflect the remaining electron beams to one or more beam dumps;
- a sample chamber, comprising
- a sample holder to hold and manipulate the sample,
- an upper objective lens to collimate the illuminating beam on the sample, and
- a lower objective lens to image a transmitted beam;
- and
- a detection chamber, comprising at least two detectors, and
- a projection system comprising a projection lens and a transmitted beam electrostatic deflector to project and deflect the transmitted beam image onto one of the at least two detectors.
Dependencies are inferred from the claim text.