Method for improved cut metal patterning
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuang-Ching Chang, Ting-Wei Chiang, Hui-Zhong Zhuang, Jung-Chan Yang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuang-Ching Chang, Ting-Wei Chiang, Hui-Zhong Zhuang, Jung-Chan Yang
Estimating the term…
A system for preparing an integrated circuit device design includes a memory for storing a plurality of preliminary integrated circuit design files; a processor for retrieving a preliminary integrated circuit design file from the memory; locating vertical abutments between adjacent device cell designs, identifying internal metal cuts on the adjacent device cell designs; determining and evaluating a horizontal spacing between the internal metal cuts a spacing threshold; and if the threshold is note met, shifting one cell horizontally relative to the other cell design by a predetermined distance to define a modified device layout, repeating the determining, evaluating, and shifting operations until the spacing threshold is satisfied; and identifying a next vertical abutment between and repeating the identifying, determining, shifting operations until the spacing threshold has been satisfied for all vertical abutments.
A system for preparing an integrated circuit device design comprising:
A system for preparing an integrated circuit device design comprising:
A system for manufacturing an integrated circuit device comprising:
Dependencies are inferred from the claim text.