# US 11,079,689 B2 · Display device and manufacturing method thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,079,689 B2 - Document ID: US11079689B2 - Status: Granted - Kind: B2 - Application number: 16/418,945 - Filed: 2019-05-21 - Published: 2020-04-23 - Granted: 2021-08-03 - Earliest claimed: 2018-10-22 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Hyun Wook Lee; Soon Wook Hong; Seung Rae Kim; Jae-Hyun Park; Min cheol Chae - Web page: https://patentgrep.com/patent/US11079689B2 ## CPC - G03F 1/00: Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof - G03F 7/70683: {Mark designs} - G03F 7/70475: {Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display} - G03F 7/70625: {Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness} - G03F 7/70633: {Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching} - G03F 9/7084: {Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels} - G02F 1/13625: {Patterning using multi-mask exposure} - G02F 1/136295: {Materials; Compositions; Manufacture processes} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS ## Abstract A display device including: a substrate having display area and a non-display area; and an alignment mark disposed in the non-display area of the substrate. The alignment mark includes a quadrangular-shaped center portion and a plurality of measurement portions that surround the center portion, the plurality of measurement portions including four or more measurement portions, and each of the measurement portions including sides that are parallel with two sides of the quadrangular-shaped center portion. ## Claims ### Claim 1 A display device comprising: a substrate having a display area and a non-display area; and an alignment mark disposed in the non-display area of the substrate, wherein: the alignment mark comprises a quadrangular-shaped center portion and a plurality of measurement portions that are separated from each other and surround the center portion; each of the measurement portions comprises sides that are parallel with two sides of the quadrangular-shaped center portion; and at least one of the measurement portions have an L-shape. ### Claim 2 (depends on 1) The display device of claim 1, wherein one or more alignment marks are disposed between the ¼ point and the ¾ point of the non-display area in a first direction. ### Claim 3 (depends on 1) The display device of claim 1, wherein the plurality of measurement portions comprise: a first measurement portion comprising sides that are in parallel with a first side and a fourth side of the quadrangular-shaped center portion and is disposed adjacent to the first side and the fourth side; a second measurement portion comprising sides that are in parallel with the first side and a second side of the quadrangular-shaped center portion and is disposed adjacent to the first side and the second side; a third measurement portion comprising sides that are in parallel with the second side and a third side of the quadrangular-shaped center portion and is disposed adjacent to the second side and the third side; and a fourth measurement portion comprising sides that are in parallel with the third side and the fourth side of the quadrangular-shaped center portion and is disposed adjacent to the third side and the fourth side. ### Claim 4 (depends on 3) The display device of claim 3, wherein a difference between a value obtained by subtracting a distance from the center portion to the third measurement portion in a second direction from a distance from the center portion to the first measurement portion in the second direction, and a value obtained by subtracting a distance from the center portion to the fourth measurement portion in the second direction from a distance from the center portion to the second measurement portion in the second direction, is about −0.8 μm to about 0.8 μm. ### Claim 5 (depends on 3) The display device of claim 3, wherein a difference between a value obtained by subtracting a distance from the center portion to the third measurement portion in the first direction from a distance from the center portion to the first measurement portion in the first direction, and a value obtained by subtracting a distance from the center portion to the fourth measurement portion in the first direction from a distance from the center portion to the second measurement portion in the first direction, is about −0.8 μm to 0.8 μm. ### Claim 6 (depends on 1) The display device of claim 1, wherein the center portion and the measurement portions comprise different materials from each other. ### Claim 7 (depends on 1) The display device of claim 1, wherein: the center portion comprises the same material as a gate line in the display area; and the measurement portions comprise the same material as a data line in the display area or the same material as a pixel electrode in the display area. ### Claim 8 (depends on 1) The display device of claim 1, wherein: the center portion comprises the same material as a data line of the display area; and the measurement portions comprise the same material as a pixel electrode of the display area. ### Claim 9 (depends on 1) The display device of claim 1, further comprising a plurality of drivers disposed in the non-display area, wherein the alignment marks are disposed between the plurality of drivers. ### Claim 10 (depends on 1) The display device of claim 1, wherein the non-display area comprises an area where two or more masks are overlapped with each other during a manufacturing process, and the alignment mark is disposed in the mask-overlapped area. ### Claim 11 (depends on 1) The display device of claim 1, wherein a horizontal length of the alignment mark is about 15 μm to about 30 μm. ### Claim 12 (depends on 1) The display device of claim 1, wherein a vertical length of the alignment mark is about 15 μm to about 30 μm. ### Claim 13 A display device comprising: a substrate having a display area and a non-display area; and an alignment mark disposed in the non-display area of the substrate, wherein: the alignment mark comprises a quadrangular-shaped center portion and a plurality of elongated measurement portions that are separated from each other and surround the center portion; the center portion and the measurement portions of the alignment mark comprise different materials; and the measurement portions comprise: a second measurement portion and a third measurement portion that are disposed on a same virtual straight line that is in parallel with a first side of the quadrangular-shaped center portion, and are disposed apart from each other, and the virtual straight line is in parallel with the elongated direction of the second measurement portion and the third measurement portion; a fourth measurement portion and a fifth measurement portion that are disposed on a same virtual straight line that is in parallel with a second side of the quadrangular-shaped center portion, and are disposed apart from each other, and the virtual straight line is in parallel with the elongated direction of the fourth measurement portion and the fifth measurement portion; a sixth measurement portion and a seventh measurement portion that are disposed on a same virtual straight line that is in parallel with a third side of the quadrangular-shaped center portion, and are disposed apart from each other, and the virtual straight line is in parallel with the elongated direction of the sixth measurement portion and the seventh measurement portion; and an eighth measurement portion and a first measurement portion that are disposed on a same virtual straight line that is in parallel with a fourth side of the quadrangular-shaped center portion, and are disposed apart from each other, and the virtual straight line is in parallel with the elongated direction of the eighth measurement portion and the first measurement portion. ### Claim 14 (depends on 13) The display device of claim 13, further comprising a plurality of drivers that are disposed in the non-display area, wherein the alignment marks are disposed between the plurality of drivers. ### Claim 15 (depends on 13) The display device of claim 13, wherein: the non-display area comprises an area where two or more masks are overlapped with each other during a manufacturing process; and the alignment mark is disposed in the mask-overlapped area. ### Claim 16 (depends on 13) The display device of claim 13, wherein: the center portion comprises the same material as a gate line or a data line of the display area; and the measurement portions comprise the same material as the data line of the display area or a pixel electrode of the display area.