# US 11,079,550 B2 · Grating coupler and integrated grating coupler system

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- Number: US 11,079,550 B2
- Document ID: US11079550B2
- Status: Granted
- Kind: B2
- Application number: 16/774,897
- Filed: 2020-01-28
- Published: 2021-04-22
- Granted: 2021-08-03
- Earliest claimed: 2019-10-22
- Assignees: Mitsubishi Electric Research Laboratories, Inc.
- Applicants: Mitsubishi Electric Research Laboratories, Inc.; Mitsubishi Electric Corporation
- Inventors: Keisuke Kojima; Satoshi Nishikawa; Shusaku Hayashi; Yosuke Suzuki; Jonathan Klamkin; Yingheng Tang
- Web page: https://patentgrep.com/patent/US11079550B2

## CPC

- G02B 6/34: utilising prism or grating {(G02B6/293 takes precedence)}
- G02B 6/124: Geodesic lenses or integrated gratings
- G02B 6/12002: {Three-dimensional structures}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A grating coupler having first and second ends for coupling a light beam to a waveguide of a chip includes a substrate configured to receive the light beam from the first end and transmit the light beam through the second end, the substrate having a first refractive index n1, a grating structure having curved grating lines arranged on the substrate, the grating structure having a second refractive index n1, wherein the curved grating lines have line width w and height d and are arranged by a pitch Λ, wherein the second refractive index n2 is less than first refractive index n1, and a cladding layer configured to cover the grating structure, wherein the cladding layer has a third refractive index n3. The curves of the grating lines are constructed such that the emitting beam is shaped for efficient coupling to another optical component. The curves can also be tilted to reduce coupling back into the waveguide.

## Claims

### Claim 1

A grating coupler having first and second ends for coupling a light beam to a waveguide of a chip comprising:
a substrate configured to receive the light beam from the first end and transmit the light beam through the second end, the substrate having a first refractive index n1;
a grating structure having grating curves arranged on the substrate, the grating structure having a second refractive index n2, wherein the grating curves have line width w and height d and are arranged by a pitch Λ, wherein the second refractive index n2 is greater than the first refractive index n1, wherein the grating curves are arranged to diffract the light beam to form a narrowing beam in a two orthogonal axes perpendicular to a light propagation direction of the light beam; and
a cladding layer configured to cover the grating structure, wherein the cladding layer has a third refractive index n3, wherein the third refractive index n3 is different from the second refractive index n2.

### Claim 2 (depends on 1)

The grating coupler of claim 1, wherein curves of the grating curves are constructed such that the diffracted beam is shaped for coupling to another grating coupler.

### Claim 3 (depends on 1)

The grating coupler of claim 1, wherein curves of the grating curves are constructed such that the diffracted beam is focused on another grating coupler.

### Claim 4 (depends on 1)

The grating coupler of claim 1, wherein the grating curves are arranged as partial elliptic lines such that the partial elliptic lines form curves having protrusions toward a light propagation direction of the light beam, wherein the spacing between the lines are narrowed as a function of a distance from the end of a waveguide.

### Claim 5 (depends on 1)

The grating coupler of claim 1, wherein the center of the grating curves are expressed as
q
⁢
⁢
λ
=
xn
c
⁢
⁢
cos
⁢
⁢
ϕ
c
-
n
eff
⁡
(
x
2
+
y
2
)
1
2
+
Δ
x
⁢
x
2
+
Δ
y
⁢
y
2
where x and y are directions parallel to and perpendicular to the light propagation, respectively, wherein q=m, m+1, m+2 . . . (m>0) is an integer corresponding to each grating line from the first end, λ is a wavelength of the light beam, nc is a refractive index of the substrate, ϕc is an angle from the waveguide surface normal, neff is an effective refractive index of the waveguide, Δx and Δy are coefficients of grating chirp.

### Claim 6 (depends on 1)

The grating coupler of claim 1, wherein the grating curves are arranged in an asymmetric manner with respect to a light propagation direction of the light beam, such that the reflected light from the grating curves is prevented from coupling to the first end of the waveguide.

### Claim 7 (depends on 1)

The grating coupler of claim 1, wherein the cladding layer comprises silicon dioxide.

### Claim 8 (depends on 1)

The grating coupler of claim 1, wherein the cladding layer comprises silicon nitride.

### Claim 9 (depends on 1)

The grating coupler of claim 1, wherein the cladding layer comprises polymer.

### Claim 10 (depends on 1)

The grating coupler of claim 1, wherein the cladding layer comprises the same material as the substrate.

### Claim 11 (depends on 1)

The grating coupler of claim 1, wherein the grating comprises more than two height levels.

### Claim 12 (depends on 1)

The grating coupler of claim 1, wherein a cross-sectional shape of the grating is asymmetric.

### Claim 13 (depends on 11)

The grating coupler of claim 11, wherein a rising edge of the grating is shaper than a falling edge of the grating.

### Claim 14 (depends on 1)

The grating coupler of claim 1, wherein the grating curves are arranged to be concave shapes against an input beam coining from a beam input.

### Claim 15 (depends on 1)

The grating coupler of claim 1, wherein distances between the grating curves are non-uniform.

### Claim 16 (depends on 15)

The grating coupler of claim 15, wherein the distances are arranged to decrease at a fixed rate.

### Claim 17 (depends on 1)

The grating coupler of claim 1, wherein the distance between a straight end of the first end to a first grating line is a multiple of the wavelength of the light beam in the waveguide, wherein the multiplier is between 50 and 500.