Semiconductor device
AssigneeRenesas Electronics Corporation
InventorsShinichi Watanuki, Yasutaka Nakashiba
Life of this patent
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Abstract
Two optical waveguides and an insulating film provided to cover the optical waveguides are formed over an insulating layer. Two wirings and a heater metal wire are formed over the insulating film via an insulating film different from the above insulating film. The latter insulating film is thinner than the former insulating film, and has a higher refractive index than the former insulating film. The leaked light from either of the two optical waveguides can be suppressed or prevented from being reflected by any one of the two wirings, the heater metal wire, and the like to travel again toward the two optical waveguides by utilizing the difference between the refractive indices of the two insulating films.
Claims14
A semiconductor device comprising:
- a first insulating film formed over a substrate;
- an optical waveguide formed over the first insulating film and having a refractive index n1;
- a second insulating film formed over the first insulating film so as to cover the optical waveguide and having a refractive index n2;
- a third insulating film formed over the second insulating film and having a refractive index n3, the third insulating film including a portion that overlaps the optical waveguide in plan view;
- and
- a conductive film formed over the third insulating film, the conductive film being formed over the portion of the third insulating film such that the conductive film overlaps the optical waveguide in plan view,
- wherein the shortest distance between the optical waveguide and the third insulating film is smaller than a thickness of the first insulating film, and
- wherein the refractive indices n1, n2, and n3 satisfy the relationships of n1 >n2 and n3 >n2.
A semiconductor device comprising:
- a first insulating film formed over a substrate;
- an optical waveguide formed over the first insulating film and having a refractive index n1;
- a second insulating film formed over the first insulating film so as to cover the optical waveguide and having a refractive index n2;
- a third insulating film formed over the second insulating film and having a refractive index n3, the third insulating film including a portion that is formed directly above the optical waveguide;
- and
- a conductive film formed over the third insulating film,
- wherein the third insulating film is arranged at a position corresponding to the conductive film,
- wherein the refractive indices n1, n2, and n3 satisfy the relationships of n1 >n2 and n3 >n2, and
- wherein the shortest distance between the optical waveguide and the third insulating film is smaller than a thickness of the first insulating film.
Dependencies are inferred from the claim text.