# US 11,079,528 B2 · Polarizer nanoimprint lithography

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- Number: US 11,079,528 B2
- Document ID: US11079528B2
- Status: Granted
- Kind: B2
- Application number: 16/366,932
- Filed: 2019-03-27
- Published: 2019-10-17
- Granted: 2021-08-03
- Earliest claimed: 2018-04-12
- Assignees: Moxtek, Inc.
- Applicants: Moxtek, Inc.
- Inventors: Bradley R. Williams; R. Stewart Nielson; Anubhav Diwan; Eric Gardner; Shaun Patrick Ogden; Bob West
- Web page: https://patentgrep.com/patent/US11079528B2

## CPC

- G02B 5/3041: {comprising multiple thin layers, e.g. multilayer stacks}
- B29D 11/00644: {polarizing}
- B29D 11/0073: {Optical laminates}
- G02B 1/14: Protective coatings, e.g. hard coatings
- G02B 5/3058: {comprising electrically conductive elements, e.g. wire grids, conductive particles}
- G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}
- G03F 7/0005: {Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor}
- G03F 7/70566: {Polarisation control}
- B82Y 20/00: Nanooptics, e.g. quantum optics or photonic crystals
- B82Y 40/00: Manufacture or treatment of nanostructures
- G03F 7/0047: {characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B29D: PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE (making granules B29B9/00; making preforms B29B11/00)
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

A method of making a polarizer can include applying a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase, then forming this into a different phase including a solid, interconnecting network of the inorganic nanoparticles. This method can improve manufacturability and reducing manufacturing cost. This method can be used to provide an antireflective coating, to provide a protective coating on polarization structures, to provide thin films for optical properties, or to form the polarization structures themselves.

## Claims

### Claim 1

A method of making a polarizer, the method comprising:
providing a substrate that is transparent;
applying an uncured imprintable layer on a first side of the substrate, the uncured imprintable layer being a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase;
imprinting a pattern of polarization structures in the uncured imprintable layer; wherein a longitudinal dimension of some of the polarization structures extend in a first direction, a longitudinal dimension of other of the polarization structures extend in a second direction, the first direction and the second direction are parallel to the first side of the substrate, and the first direction is a different direction from the second direction;
curing the uncured imprintable layer into a cured printed layer, the cured printed layer including a solid, interconnecting network of the inorganic nanoparticles;
applying an uncured fill layer on top of the polarization structures and extending into channels between the polarization structures, the uncured fill layer being a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase, chemistry of the uncured fill layer and chemistry of a surface of the polarization structures are attractive to each other; and
curing the uncured fill layer to form a cured fill layer, the cured fill layer including a solid, interconnecting network of the inorganic nanoparticles.

### Claim 2 (depends on 1)

The method of claim 1, wherein a width of at least some of the polarization structures extending in the first direction and a width of at least some of the polarization structures extending in the second direction is ≤5500 nm, the width being perpendicular to the longitudinal dimension and parallel to the first side of the substrate.

### Claim 3 (depends on 1)

The method of claim 1, wherein the substrate and the polarization structures are dielectric.

### Claim 4 (depends on 1)

The method of claim 1, wherein the first direction is perpendicular to the second direction.

### Claim 5 (depends on 1)

The method of claim 1, wherein the polarization structures have ≥three different thicknesses, the thicknesses being a dimension perpendicular to the first side of the substrate.

### Claim 6 (depends on 1)

The method of claim 1, wherein the substrate has a second side opposite of the first side, the method further comprising:
applying an uncured backside layer to the second side of the substrate, the uncured backside layer being a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase; and
curing the uncured backside layer to form a cured backside layer, the cured backside layer including a solid, interconnecting network of the inorganic nanoparticles.

### Claim 7

A method of making a polarizer, the method comprising:
providing a substrate that is transparent;
applying an uncured imprintable layer on a first side of the substrate, the uncured imprintable layer being a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase;
imprinting a pattern of polarization structures in the uncured imprintable layer; wherein a longitudinal dimension of some of the polarization structures extend in a first direction, a longitudinal dimension of other of the polarization structures extend in a second direction, the first direction and the second direction are parallel to the first side of the substrate, and the first direction is a different direction from the second direction;
curing the uncured imprintable layer into a cured printed layer, the cured printed layer including a solid, interconnecting network of the inorganic nanoparticles;
applying an overcoat layer on the cured printed layer;
applying an uncured cover layer to an outer surface of the overcoat layer farthest from the substrate, the uncured cover layer being a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase, chemistry of the uncured cover layer and chemistry of the outer surface of the overcoat layer are repellant with respect to each other; and
curing the uncured cover layer to form a cured cover layer, the cured cover layer including a solid, interconnecting network of the inorganic nanoparticles.

### Claim 8 (depends on 1)

The method of claim 1, wherein imprinting the pattern of polarization structures includes imprinting separate pixels.

### Claim 9 (depends on 1)

The method of claim 1, further comprising:
placing a second substrate onto the uncured fill layer.

### Claim 10

A method of making a polarizer, the method comprising:
providing a substrate that is transparent;
applying an uncured imprintable layer on a first side of the substrate, the uncured imprintable layer being a solution including molecules in a solvent, the solvent including water and an organic liquid, the molecules including metal atoms bonded to reactive groups, where each reactive-group is independently —Cl, —OR2, —OCOR2, or —N(R2)2, and R2 is an alkyl group;
imprinting a pattern of polarization structures in the uncured imprintable layer; wherein a longitudinal dimension of some of the polarization structures extend in a first direction, a longitudinal dimension of other of the polarization structures extend in a second direction, the first direction and the second direction are parallel to the first side of the substrate, and the first direction is a different direction from the second direction;
reacting the molecules to form a solid of the metal atoms interconnected with each other, defining a cured printed layer;
applying an uncured fill layer on top of the polarization structures and extending into channels between the polarization structures, the uncured fill layer being a solution including molecules in a solvent, the solvent including water and an organic liquid, the molecules including metal atoms bonded to reactive groups, where each reactive-group is independently —Cl, —OR2, —OCOR2, or —N(R2)2, and R2 is an alkyl group, chemistry of the uncured fill layer and chemistry of a surface of the polarization structures are attractive to each other; and
reacting the molecules to form a solid of the metal atoms interconnected with each other, defining a cured fill layer.

### Claim 11 (depends on 10)

The method of claim 10, further comprising placing a second substrate on the uncured fill layer.

### Claim 12 (depends on 10)

The method of claim 10, wherein every bond of the metal atoms is bonded, independently, to one the reactive groups.

### Claim 13 (depends on 10)

The method of claim 10, wherein the metal atoms include Si(R1)4, Al(R1)3, Ti(R1)4, or combinations thereof, where each R1 is, independently, one of the reactive groups.

### Claim 14 (depends on 10)

The method of claim 10, wherein the molecules have a molecular weight of ≥80 g/mol and ≤150 g/mol.

### Claim 15 (depends on 10)

The method of claim 10, wherein imprinting the pattern of polarization structures includes imprinting separate pixels.

### Claim 16 (depends on 7)

The method of claim 7, wherein imprinting the pattern of polarization structures includes imprinting separate pixels.

### Claim 17 (depends on 7)

The method of claim 7, further comprising placing a second substrate onto the uncured cover layer.

### Claim 18 (depends on 7)

The method of claim 7, wherein:
the substrate and the polarization structures are dielectric;
the polarization structures have ≥three different thicknesses, the thicknesses being a dimension perpendicular to the first side of the substrate; and
the polarizer can transmit ≥50% of incident light as a single polarization.

### Claim 19 (depends on 18)

The method of claim 18, wherein the polarizer can transmit ≥60% of incident light as a single polarization.

### Claim 20 (depends on 10)

The method of claim 10, wherein:
the substrate and the polarization structures are dielectric;
the polarization structures have ≥three different thicknesses, the thicknesses being a dimension perpendicular to the first side of the substrate; and
the polarizer can transmit ≥50% of incident light as a single polarization.