# US 11,079,520 B2 · Broadband achromatic metalens in the visible spectrum

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- Number: US 11,079,520 B2
- Document ID: US11079520B2
- Status: Granted
- Kind: B2
- Application number: 16/231,868
- Filed: 2018-12-24
- Published: 2019-06-27
- Granted: 2021-08-03
- Earliest claimed: 2017-12-26
- Assignees: Academia Sinica
- Applicants: Academia Sinica
- Inventors: Din-Ping Tsai; Pin-Chieh Wu
- Web page: https://patentgrep.com/patent/US11079520B2

## CPC

- G02B 5/008: {Surface plasmon devices (diffractive gratings with a pitch less than or comparable to the wavelength G02B5/1809; surface plasmons in integrated optics G02B6/1226; optical analysis of materials by means of surface plasmons G01N21/553)}
- G02B 1/002: {made of materials engineered to provide properties not available in nature, e.g. metamaterials}
- G02F 1/0063: {Optical properties, e.g. absorption, reflection or birefringence (materials for non-linear optics G02F1/355)}
- B82Y 20/00: Nanooptics, e.g. quantum optics or photonic crystals
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

In this disclosure, an optical component which comprises an array of metalenses is provided. Each metalens comprises a plurality of nanostructures and a dielectric layer and the nanostructures are disposed on the dielectric layer, and the nanostructures comprises an array of first phase compensation structures, and an array of second phase compensation structures. The array of the first phase compensation structures are disposed to surround the array of the second phase compensation structures so as to define a single metalens. The first and second phase compensation structures are complementary to each other and substantially satisfy the Babinet's principle.

## Claims

### Claim 1

An optical component comprising an array of metalenses, wherein each metalens comprises a plurality of nanostructures and a dielectric layer, wherein the nanostructures are disposed on the dielectric layer, and the nanostructures comprise:
an array of first phase compensation structures; and
an array of second phase compensation structures, wherein the array of the first phase compensation structures are disposed to surround the array of the second phase compensation structures so as to define a single metalens, the first and second phase compensation structures are complementary to each other and substantially satisfy the Babinet's principle.

### Claim 2 (depends on 1)

The optical component according to claim 1, wherein each first phase compensation structure is a nanopillar, each second phase compensation structure is a nanopore.

### Claim 3 (depends on 2)

The optical component according to claim 2, wherein each of the first nanopillars has a length ranging from 80 to 165 nm, a width ranging from 45 to 110 nm and a height of 800 nm.

### Claim 4 (depends on 2)

The optical component according to claim 2, wherein each of the nanopores has a length ranging from 125 to 163 nm, a width ranging from 50 to 80 nm, and a height of 800 nm.

### Claim 5 (depends on 1)

The optical component according to claim 1, wherein each metalens has a phase profile which satisfy the following equations (A) to (D),
φ
AL
⁡
(
r
,
λ
)
=
-
[
2
⁢
⁢
π
λ
⁢
(
r
2
+
f
2
-
f
)
]
+
φ
shift
⁡
(
λ
)
(
A
)
φ
shift
⁡
(
λ
)
=
a
λ
+
b
(
B
)
a
=
δ
⁢
λ
min
⁢
λ
max
λ
max
-
λ
min
(
C
)
b
=
-
δ
⁢
λ
min
λ
max
-
λ
min
(
D
)
where φAL is a phase retardation of an arbitrary point on a surface of the metalens, r is a distance between said arbitrary point and a center on said surface of the metalens, λ is a working wavelength in free space, f is a designed focal length, λmin and λmax are boundaries of an interest wavelength band, and δ is a largest additional phase shift between λmin and λmax at the center of the metalens.

### Claim 6 (depends on 1)

The optical component according to claim 1, wherein the first phase compensation structures have phase compensations ranging from 660 degree (°) to 1050 degree (°).

### Claim 7 (depends on 6)

The optical component according to claim 6, wherein the second phase compensation structures have phase compensations ranging from 1080 degree (°) to 1140 degree (°).

### Claim 8 (depends on 1)

The optical component according to claim 1, wherein each first phase compensation structure and each second phase compensation structure are made of a transparent material which is selected from the group consisting of gallium nitride (GaN), gallium phosphide (GaP), aluminum arsenide (AlAs), aluminum gallium arsenide (AlGaAs), titanium dioxide (TiO2), silicon (Si) and silicon nitride (Si3N4).

### Claim 9 (depends on 1)

The optical component according to claim 1, the first and second phase compensation structures are in a periodic hexagonal lattice.

### Claim 10 (depends on 1)

The optical component according to claim 1, wherein the dielectric layer is made of a material which is selected from the group consisting of ITO, Al:ZnO, Ga:ZnO, MgF2, HfO2, Si3N4, SiO2 and Al2O3.

### Claim 11 (depends on 1)

The optical component according to claim 1, wherein each metalens is transparent.

### Claim 12 (depends on 1)

The optical component according to claim 1, wherein focal lengths of all metalenses are the same.

### Claim 13 (depends on 1)

The optical component according to claim 1, wherein at least one of the metalens has a focal length which is different from that of another metalens.

### Claim 14 (depends on 1)

The optical component according to claim 1, wherein the array of the first phase compensation structures surrounds the array of the second phase compensation structures concentrically.
