# US 11,079,430 B2 · Electronic component handler and electronic component tester

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- Number: US 11,079,430 B2
- Document ID: US11079430B2
- Status: Granted
- Kind: B2
- Application number: 16/464,368
- Filed: 2017-11-28
- Published: 2021-05-27
- Granted: 2021-08-03
- Earliest claimed: 2016-11-29
- Assignees: NS Technologies, Inc.
- Applicants: NS Technologies, Inc.
- Inventors: Daisuke Ishida; Shuichi Wakabayashi; Yasushi Mizoguchi; Hirokazu Ishida; Tatsunori Takahashi; Kensuke Ogasawara; Takahito Sanekata
- Web page: https://patentgrep.com/patent/US11079430B2

## CPC

- G01R 31/2887: {involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392)}
- G01R 31/2891: {related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05)}
- G01R 31/2893: {Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

An electronic component handler includes a first holder that is movable in a first direction and a second direction different from the first direction and is capable of holding an electronic component, a second holder that is movable in the first direction and the second direction independently of the first holder and is capable of holding the electronic component, a light irradiation section that is arranged so as to be capable of irradiating an electronic component placement portion on which the electronic component is placed with light through a gap between the first holder and the second holder, and an imaging section that is capable of imaging the electronic component placement portion irradiated with the light in the first direction, and determines whether or not the electronic component is placed on the electronic component placement portion based on the imaging result obtained by imaging by the imaging section.

## Claims

### Claim 1

An electronic component handler comprising:
a first holder that is movable in a first direction and a second direction different from the first direction and is capable of holding an electronic component;
a second holder that is movable in the first direction and the second direction independently of the first holder and is capable of holding the electronic component;
a light irradiation section that is arranged so as to be capable of irradiating an electronic component placement portion, on which the electronic component is placed with light through a gap between the first holder and the second holder; and
an imaging section that is capable of imaging the electronic component placement portion irradiated with the light in the first direction,
wherein it is determined whether or not the electronic component is placed on the electronic component placement portion based on the imaging result obtained by imaging by the imaging section.

### Claim 2 (depends on 1)

The electronic component handler according to claim 1,
wherein the first holder and the second holder are arranged in the second direction.

### Claim 3 (depends on 1)

The electronic component handler according to claim 1,
wherein the first holder and the second holder are simultaneously movable in the second direction.

### Claim 4 (depends on 1)

The electronic component handler according to claim 1,
wherein the first holder is positioned between the imaging section and the electronic component when pushing the electronic component against the electronic component placement portion, and
the second holder is positioned between the imaging section and the electronic component when pushing the electronic component against the electronic component placement portion.

### Claim 5 (depends on 1)

The electronic component handler according to claim 1,
wherein the light irradiation section performs irradiation with the light in a direction at least intersecting the first direction and not orthogonal to the first direction.

### Claim 6 (depends on 1)

The electronic component handler according to claim 1,
wherein the direction of the light with which the light irradiation section performs irradiation is capable of being adjusted.

### Claim 7 (depends on 1)

The electronic component handler according to claim 1, further comprising:
an irradiation position determination unit for determining whether or not the direction in which the light irradiation section performs irradiation with the light is a predetermined direction.

### Claim 8 (depends on 1)

The electronic component handler according to claim 1,
wherein the light irradiation section performs irradiation with the light whose irradiation shape at an irradiation destination is a linear shape extending in the second direction.

### Claim 9 (depends on 1)

The electronic component handler according to claim 1,
wherein a plurality of the light irradiation sections are provided.

### Claim 10 (depends on 9)

The electronic component handler according to claim 9,
wherein the electronic component placement portions include a plurality of recesses arranged along a third direction intersecting the first direction and the second direction and accommodate the electronic component, and
the light irradiation sections are arranged along the third direction.

### Claim 11 (depends on 1)

The electronic component handler according to claim 1, further comprising:
a light reflection portion that reflects the light emitted from the light irradiation section.

### Claim 12 (depends on 11)

The electronic component handler according to claim 11,
wherein the light reflection portion is configured to be pivotable,
the light reflection portion has a light reflection surface that reflects the light, and
a pivot axis of the light reflection portion is positioned on the light reflection surface.

### Claim 13 (depends on 11)

The electronic component handler according to claim 11,
wherein a plurality of the light irradiation sections and a plurality of the light reflection portions are provided, and
the light reflection portions are arranged in a third direction intersecting the first direction and the second direction.

### Claim 14 (depends on 13)

The electronic component handler according to claim 13,
wherein an optical axis of the imaging section intersects an extension line in a direction in which the light reflection portions are aligned.

### Claim 15 (depends on 13)

The electronic component handler according to claim 13, further comprising:
light reflection portion driving units for pivoting the light reflection portion,
wherein respective light reflection portion driving units are arranged along the third direction intersecting the first direction and the second direction, and
the light reflection portion driving units adjacent in the third direction are arranged to be shifted in the second direction.

### Claim 16 (depends on 1)

The electronic component handler according to claim 1,
wherein the imaging section is capable of imaging the electronic component placement portion through a gap between the first holder and the second holder, between the imaging start time and the imaging end time.

### Claim 17 (depends on 1)

The electronic component handler according to claim 1,
wherein the light irradiation section performs irradiation with the light before the imaging start time and stops irradiation with the light after the imaging end time.

### Claim 18 (depends on 1)

The electronic component handler according to claim 1,
wherein the electronic component placement portion is a test unit by which the electronic component is tested.

### Claim 19 (depends on 1)

The electronic component handler according to claim 1,
wherein the electronic component placement portion includes a recess for accommodating the electronic component,
the recess has an inner circumferential surface inclined with respect to a third direction which is the direction intersecting the first direction and the second direction, and
an incident angle of the light emitted from the light irradiation section is smaller than an angle between the inner circumferential surface of the recess and the third direction.

### Claim 20

An electronic component tester comprising:
a first holder that is movable in a first direction and a second direction different from the first direction and is capable of holding an electronic component;
a second holder that is movable in the first direction and the second direction independently of the first holder and is capable of holding the electronic component;
a light irradiation section that is arranged so as to be capable of irradiating an electronic component placement portion, on which the electronic component is placed, with light through a gap between the first holder and the second holder;
an imaging section that is capable of imaging the electronic component placement portion irradiated with the light in the first direction; and
a test unit that tests the electronic component, and
wherein it is determined whether or not the electronic component is placed on the electronic component placement portion based on the imaging result obtained by imaging by the imaging section.
