# US 11,079,406 B2 · Semiconductor micro probe array having compliance

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- Number: US 11,079,406 B2
- Document ID: US11079406B2
- Status: Granted
- Kind: B2
- Application number: 15/252,301
- Filed: 2016-08-31
- Published: 2018-03-01
- Granted: 2021-08-03
- Earliest claimed: 2016-08-31
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Eugene R. Atwood
- Web page: https://patentgrep.com/patent/US11079406B2

## CPC

- G01R 1/06716: {Elastic}
- G01R 1/0735: {arranged on a flexible frame or film}
- G01R 1/07378: {using an intermediate adapter, e.g. space transformers (G01R1/07371 takes precedence)}
- G01R 31/2889: {Interfaces, e.g. between probe and tester (G01R31/31905 and G01R1/07364 take precedence)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A die probe including a probe tip operably connected to a first surface of a thin film; a metal trace, wherein a first portion of the metal trace is operably connected to a second surface of the thin film, the second surface of the thin film opposite the first surface of the thin film; and an upper space transformer, wherein a second portion of the metal trace is operably connected to the upper space transformer, wherein a pressurized liquid and/or gas is configured to expand a space between the second surface of the thin film and the upper space transformer.

## Claims

### Claim 1

A die probe comprising:
a probe tip operably connected to a first surface of a thin film;
a metal trace comprising a first end, a second end and a middle portion between the first end and the second end, wherein the middle portion of the metal trace is operably connected to a second surface of the thin film, the second surface of the thin film opposite the first surface of the thin film;
an upper space transformer, wherein both the first end and the second end of the metal trace are in physical contact with a first surface of the upper space transformer, wherein a pressurized liquid and/or gas is configured to expand a space between the second surface of the thin film and the upper space transformer, wherein the metal trace is configured to vertically expand and vertically contract between an expanded state and an unexpanded state, and wherein the probe tip is configured to move closer to, and further from, the upper space transformer; and
a release layer of material on the first surface of the upper space transformer.

### Claim 2 (depends on 1)

The die probe of claim 1, wherein the thin film is a polyimide.

### Claim 3 (depends on 1)

The die probe of claim 1, wherein thin film is operably connected to the upper space transformer.

### Claim 4 (depends on 1)

The die probe of claim 1, wherein the pressurized liquid and/or gas enters the space between the second surface of the thin film and the upper space transformer through an opening in the upper space transformer.

### Claim 5 (depends on 1)

The die probe of claim 1, wherein the probe tip is electrically connected to the metal trace by a via.

### Claim 6 (depends on 5)

The die probe of claim 5, wherein the via passes through the thin film.

### Claim 7 (depends on 5)

The die probe of claim 5, further comprising a via land between the metal trace and the upper space transformer.

### Claim 8 (depends on 1)

The die probe of claim 1, wherein the space between the second surface of the thin film and the upper space transformer expands up to about 5 microns.

### Claim 9 (depends on 1)

The die probe of claim 1, wherein the metal trace is electrically connected to a solder bump by a silicon via.

### Claim 10 (depends on 9)

The die probe of claim 9, wherein the silicon via passes through the upper space transformer.

### Claim 11 (depends on 1)

The die probe of claim 1, further comprising a thin film land between the metal trace and the thin film.

### Claim 12 (depends on 1)

The die probe of claim 1, further comprising a second release layer of material on the second surface of the thin film.

### Claim 13 (depends on 1)

The die probe of claim 1, wherein, in the expanded state, the middle portion is nearer the probe tip than either of the first end or the second end.

### Claim 14 (depends on 1)

The die probe of claim 1, wherein in the unexpanded state a distance between the upper space transformer and the second surface of the thin film is a thickness of the metal trace in a thickness direction, the thickness direction orthogonal to the thin film.

### Claim 15

A die probe comprising:
a probe tip operably connected to a first surface of a thin film;
a metal trace comprising a first end, a second end and a middle portion between the first end and the second end, wherein the middle portion of the metal trace is operably connected to a second surface of the thin film, the second surface of the thin film opposite the first surface of the thin film;
an upper space transformer, wherein both the first end and the second end of the metal trace are operably connected to a first surface of the upper space transformer, wherein a pressurized liquid and/or gas is configured to expand a space between the second surface of the thin film and the upper space transformer, wherein the metal trace is configured to vertically expand and vertically contract between an expanded state and an unexpanded state, and wherein the probe tip is configured to move closer to, and further from, the upper space transformer, wherein, in the expanded state, the middle portion is nearer the probe tip than either of the first end or the second end; and
a release layer of material on the first surface of the upper space transformer.