X-ray inspection device

An X-ray inspection device comprising:

• a sample placement unit for placing a sample as an inspection target;
• a sample placement unit positioning mechanism for moving the sample placement unit;
• a goniometer including first and second rotation members that rotate independently of each other;
• an X-ray irradiation unit that is installed on the first rotation member and irradiates X-rays focusing onto a preset measurement point;
• and
• a two-dimensional X-ray detector installed on the second rotation member,
• wherein the goniometer includes a θs rotation mechanism for rotating the first rotation member around a θs-axis that passes through the measurement point and extends in a horizontal direction to set an incident angle of X-rays from the X-ray irradiation unit to the sample placed in the sample placement unit, and a θd rotation mechanism for rotating the second rotation member around a θd-axis coincident with the θs-axis to set a scanning angle of the X-ray detector,
• wherein the sample placement unit positioning mechanism includes a ϕ rotation mechanism for rotating the sample placement unit around a ϕ-axis orthogonal to a surface of the sample placed in the sample placement unit, an X movement mechanism for linearly moving the sample placement unit and the ϕ-axis in an X direction intersecting perpendicularly to the θs-axis and the θd-axis, a Y movement mechanism for linearly moving the sample placement unit and the ϕ-axis in a Y direction intersecting perpendicularly to the X direction, a Z movement mechanism for moving the sample placement unit in a Z direction orthogonal to the surface of the sample placed in the sample placement unit, a χ rotation mechanism for rotating the sample placement unit and the ϕ-axis around a χ-axis that is orthogonal to the θs-axis and the θd-axis at the measurement point and extends in the horizontal direction, and a χω rotation mechanism that rotates the sample placement unit and the ϕ-axis around a χω-axis that is orthogonal to the χ-axis at the measurement point and extends in parallel to the surface of the sample placed in the sample placement unit, and is rotated around the χ-axis by the χ rotation mechanism, and
• wherein the X-ray irradiation unit is configured to focus X-rays in a lateral direction that intersects perpendicularly to an optical axis of the X-rays and is parallel to the θs-axis, and also focus X-rays in a longitudinal direction that intersects perpendicularly to an optical axis of the X-rays and intersects perpendicularly to the θs-axis.