# US 11,079,324 B2 · Spectrometer with wide-scan tunable diode laser

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- Number: US 11,079,324 B2
- Document ID: US11079324B2
- Status: Granted
- Kind: B2
- Application number: 16/511,429
- Filed: 2019-07-15
- Published: 2021-01-21
- Granted: 2021-08-03
- Earliest claimed: 2019-07-15
- Assignees: SpectraSensors, Inc.
- Applicants: SpectraSensors, Inc.
- Inventors: Xiang Liu; Alfred Feitisch; Gary Yeh; Chih-Hsuan Chang
- Web page: https://patentgrep.com/patent/US11079324B2

## CPC

- G01N 21/39: using tunable lasers
- G01J 3/10: Arrangements of light sources specially adapted for spectrometry or colorimetry
- G01J 3/433: Modulation spectrometry; Derivative spectrometry
- G01N 21/01: Arrangements or apparatus for facilitating the optical investigation
- G01N 21/3504: for analysing gases, e.g. multi-gas analysis
- G01J 2003/423: {Spectral arrangements using lasers, e.g. tunable}
- G01N 2021/399: {Diode laser}
- G01N 2201/0691: Modulated (not pulsed supply)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

A method for implementation by a laser spectrometer is provided. The method includes first scanning, by a control unit using a first set of laser spectrometer operating parameters, a first wavelength range by adjusting a wavelength of light of a beam emitted by a laser light source and passing through a sample gas. The first wavelength range encompasses a first spectral feature corresponding to a first constituent. The method also includes at least one second scanning, by the control unit using a second set of laser spectrometer operating parameters, a second wavelength range by adjusting the wavelength of light emitted from the laser light source and passing through the sample gas. The second wavelength range has a second spectral feature corresponding to at least one second constituent. The control unit also determines a first concentration of the first constituent and a second concentration of the at least one second constituent.

## Claims

### Claim 1

A method for implementation by a spectrometer comprising a laser light source, a control unit, and at least one detector positioned such that light emitted by the laser light source is detected by the at least one detector after passing through a sample gas, the method comprising:
first scanning, by the control unit using a first set of laser spectrometer operating parameters, a first wavelength range by adjusting a wavelength of light of a beam emitted by the laser light source and passing through the sample gas, the first wavelength range encompassing a first spectral feature corresponding to a first constituent;
at least one second scanning, upon completion of the first scanning and by the control unit using a second set of laser spectrometer operating parameters at least partially different from the first set of laser spectrometer operating parameters, a second wavelength range by adjusting the wavelength of light emitted from the laser light source and passing through the sample gas, the second wavelength range having a second spectral feature corresponding to at least one second constituent;
adjusting at least one operating parameter between the first scanning and the second scanning to separate an overlap of spectral peaks; and
determining, by the control unit, based on both of the first scanning and the second scanning, a first concentration of the first constituent and a second concentration of the at least one second constituent.

### Claim 2 (depends on 1)

The method of claim 1, wherein the first set of laser spectrometer operating parameters and/or the second set of laser spectrometer operating parameters are at least one of: a drive current, a modulation current, a ramp current, an intensity, a signal detection gain and/or a phase.

### Claim 3 (depends on 1)

The method of claim 1, wherein a temperature of the laser light source is the same in both the first scanning and the at least one second scanning.

### Claim 4 (depends on 1)

The method of claim 1, wherein a first temperature of the laser light source during the first scanning is different than a second temperature of the laser light source during the at least one second scanning.

### Claim 5 (depends on 1)

The method of claim 1, wherein the first wavelength range partially overlaps the second wavelength range.

### Claim 6 (depends on 1)

The method of claim 1, wherein the first wavelength range does not overlap the second wavelength range.

### Claim 7 (depends on 1)

The method of claim 1, wherein the first wavelength range and/or the at least one second wavelength range includes multiple spectral features corresponding to the first constituent and/or the at least one second constituent, wherein the multiple spectral features for each of the first constituent and/or the at least one second constituent are distinguishable from each other.

### Claim 8 (depends on 1)

The method of claim 1, further comprising: generating a spectrum encompassing at least the first spectral feature and the second spectral feature, the spectrum obtained by adjusting at least one of: a drive current, a modulation current, a ramp current, an intensity a signal detection gain and/or a phase, or a temperature of the laser light source during at least one of the first scanning or the at least one second scanning.

### Claim 9 (depends on 1)

The method of claim 1, further comprising: applying, based on pre-defined calibration data, a correction to at least one set of laser spectrometer operating parameters to accommodate wavelength drift, change of current tuning rate, and/or temperature tuning rate of the laser light source.

### Claim 10 (depends on 1)

The method of claim 1, wherein a scanning range of each of the first wavelength range and the second wavelength range span 1-10 times or 1-100 times or 1-1000 times of a full-width half-maximum of a spectral feature.

### Claim 11 (depends on 1)

The method of claim 1, further comprising: adjusting during the first scanning and/or the second scanning, any of a drive current ramp rate, a signal gain, a detection phase, and a signal intensity, within a minimum value and maximum value.

### Claim 12 (depends on 1)

The method of claim 1, wherein the first wavelength range at least encompasses a full-width half-maximum of the first spectral feature and the second wavelength range at least encompasses a full-width half-maximum of the second spectral feature.

### Claim 13 (depends on 1)

The method of claim 1, wherein the laser light source comprises at least one of:
a tunable diode laser, a tunable semiconductor laser, a tunable solid state laser, a quantum cascade laser (QCL), an intra-band cascade laser (ICL), a vertical cavity surface emitting laser (VCSEL), a horizontal cavity surface emitting laser (HCSEL), a distributed feedback laser (DFB), a distributed Bragg reflector laser (DBR).

### Claim 14 (depends on 1)

The method of claim 1, wherein the at least one detector comprises at least one of an indium gallium arsenide (InGaAs) detector, an indium arsenide (InAs) detector, an indium phosphide (InP) detector, a silicon (Si) detector, a silicon germanium (SiGe) detector, a germanium (Ge) detector, a mercury cadmium telluride detector (HgCdTe or MCT), a lead sulfide (PbS) detector, a lead selenide (Pb Se) detector, a thermopile detector, a multi-element array detector, a single element detector, a CMOS (complementary metal oxide semiconductor) detector, a CCD (charge coupled device detector) detector, or a photo-multiplier.

### Claim 15 (depends on 1)

The method of claim 1, wherein a housing defines a sample cell that comprises at least one of a Herriott Cell, an off-axis optical resonator, an on-axis optical resonator, an elliptical light collector, a White cell, a spheroidal cell, a non-Herriott longitudinal flow sample call, an optical cavity, a hollow core light guide, a multiple pass configuration in which the light beam is reflected at least once, or a single pass configuration in which the light is not being reflected while the light traverses the sample cell.

### Claim 16 (depends on 1)

The method of claim 1, wherein the sample gas is in a sample volume forming part of an open path system.

### Claim 17 (depends on 1)

The method of claim 1, further comprising:
calculating, based on the first scanning and/or the second scanning, the first concentration based in part on the spectral feature of the first constituent and the second concentration of the at least one second constituent of the sample gas.

### Claim 18

A spectrometer comprising:
a laser light source;
a control unit; and
at least one detector positioned such that light emitted by the laser light source is detected by the at least one detector after passing through a sample gas, the control unit causing:
first scanning, by the control unit using a first set of laser spectrometer operating parameters, a first wavelength range by adjusting a wavelength of light of a beam emitted by the laser light source and passing through the sample gas, the first wavelength range encompassing a first spectral feature corresponding to a first constituent;
at least one second scanning, upon completion of the first scanning and by the control unit using a second set of laser spectrometer operating parameters at least partially different from the first set of laser spectrometer operating parameters, a second wavelength range by adjusting the wavelength of light emitted from the laser light source and passing through the sample gas, the second wavelength range having a second spectral feature corresponding to at least one second constituent;
adjusting at least one operating parameter between the first scanning and the second scanning to separate an overlap of spectral peaks; and
determining, by the control unit, based on both of the first scanning and the at least one second scanning, a first concentration of the first constituent and a second concentration of the at least one second constituent.

### Claim 19

A non-transitory computer program product storing instructions which, when executed by at least one data processor forming part of a control unit controlling at least one of a laser light source and at least one detector positioned such that light emitted by the laser light source is detected by the at least one detector after passing through a sample gas, result in the control unit executing operations comprising:
first scanning, by the control unit using a first set of laser spectrometer operating parameters, a first wavelength range by adjusting a wavelength of light of a beam emitted by the laser light source and passing through the sample gas, the first wavelength range encompassing a first spectral feature corresponding to a first constituent;
at least one second scanning, upon completion of the first scanning and by the control unit using a second set of laser spectrometer operating parameters at least partially different from the first set of laser spectrometer operating parameters but with a temperature of the laser light source being the same in both the first scanning and the at least one second scanning, a second wavelength range by adjusting the wavelength of light emitted from the laser light source and passing through the sample gas, the second wavelength range having a second spectral feature corresponding to at least one second constituent;
adjusting at least one operating parameter between the first scanning and the second scanning to separate an overlap of spectral peaks; and
determining, by the control unit, based on both of the first scanning and the at least one second scanning, a first concentration of the first constituent and a second concentration of the at least one second constituent.

### Claim 20 (depends on 19)

The computer program product of claim 19, wherein the first set of laser spectrometer operating parameters and/or the second set of laser spectrometer operating parameters are at least one of: a drive current, a modulation current, a ramp current, a signal detection gain and/or phase.

### Claim 21 (depends on 19)

The computer program product of claim 19, further comprising:
calculating, based on the first scanning and/or the second scanning, the first concentration based in part on the spectral feature of the first constituent and the second concentration based in part on the spectral feature of the at least one second constituent of the sample gas.
