Scroll type micro-compressor, and method for machining fixed scroll plate and orbit scroll plate thereof

A scroll type micro-compressor, comprising:

• a fixed scroll plate and an orbit scroll plate, each integrally made with a monocrystalline silicon substrate;
• wherein the fixed scroll plate further comprises:
• a fixed scroll plate substrate;
• a fixed scroll wall integrally formed on an upper surface of the fixed scroll plate substrate;
• and
• an annular shell integrally formed on the upper surface of the fixed scroll plate substrate and located outside the fixed scroll wall, wherein a side of the annular shell is provided with an inlet, and an upper surface of the annular shell is provided with a pair of cylindrical keyways radially and symmetrically distributed with respect to the fixed scroll wall;
• wherein a plurality of micropores uniformly distributed along the fixed scroll wall are provided to extend from a lower surface of the fixed scroll plate substrate into the fixed scroll wall through the fixed scroll plate substrate, the micropores being filled with electrode materials connected by wires to pads provided respectively on the lower surface of the fixed scroll plate substrate and close to edges of the fixed scroll plate substrate, a cross-sectional shape of the micropore being a fan ring, points on an inner arc edge of the fan ring being equidistant from an inside edge of the fixed scroll wall, and points on an outer arc edge of the fan ring being equidistant from an outside edge of the fixed scroll wall;
• and wherein a through-hole is provided on the fixed scroll plate substrate and at a center of the fixed scroll wall as a discharge port;
• wherein the orbit scroll plate further comprises:
• an orbit scroll plate substrate, comprising a circular body portion and a pair of short arms coplanar with the circular body portion and provided to radially extend from two ends of a diameter of the circular body portion, either of the two short arms being provided with a raised cylindrical insertion key;
• and
• an orbit scroll wall provided on an upper surface of the orbit scroll plate substrate;
• and wherein a distance between central axes of the two cylindrical insertion keys is equal to a distance between central axes of the two cylindrical keyways, and a cross-sectional diameter of the cylindrical insertion key is smaller than a cross-sectional diameter of the cylindrical keyway, so that the insertion key is inserted into a corresponding keyway, and wherein the insertion key and the keyway form an Oldham ring structure to prevent an autogyration of the orbit scroll plate.