Microfluidic fan

A method for manufacturing a device for controlling a flow of a gaseous fluid, the method comprising:

• providing a first electrode, the first electrode comprising at least a portion having a maximum height in a direction parallel to the direction of the flow and a maximum width in a direction orthogonal to the direction of the flow, and wherein said maximum height is larger than said maximum width;
• providing a second electrode, the second electrode comprising a portion which is formed as a thermally conducting flange extending in a plane parallel to a direction of the flow and being adapted to dissipate heat from the gaseous fluid;
• providing, on at least one of the first electrode or the second electrode, a suspension structure, wherein the suspension structure is arranged in a plane orthogonal to the direction of the flow for absorbing thermally induced deformations in the first electrode or the second electrode;
• and
• arranging the second electrode offset from the first electrode in the direction of the flow.

A method for controlling a flow of a gaseous fluid, the method comprising:

• providing a first electrode of a device, the first electrode comprising at least a portion having a maximum height in a direction parallel to the direction of the flow and a maximum width in a direction orthogonal to the direction of the flow, and wherein said maximum height is larger than said maximum width;
• providing a second electrode of the device, the second electrode comprising a portion which is offset from at least a portion of the first electrode in a downstream direction of the flow and being adapted to dissipate heat from the gaseous fluid;
• providing a plurality of thermally conducting flanges extending in a first plane oriented along a direction of the flow, arranged around at least a portion of the first electrode, whereby the thermally conducting flanges define a volume receiving at least a portion of the first electrode, and the plurality of thermally conducting flanges being adapted to dissipate heat from the gaseous fluid;
• arranging the second electrode offset from the first electrode in the direction of the flow;
• providing the gaseous fluid that contacts the first electrode of the device;
• and
• applying an electric potential difference between the first electrode and the second electrode.