Apparatus for producing an ingot comprising a crucible body with a lid assembly having a movable core member and method for producing silicon carbide ingot using the apparatus
AssigneeSkc Co., Ltd.
InventorsByung Kyu Jang, Jung-Gyu Kim, Jung Woo Choi, Kap-Ryeol Ku, Sang Ki Ko
Life of this patent
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Abstract
An apparatus for producing an ingot includes a crucible body having an opening and in which raw materials are accommodated, and a lid assembly located at the opening and having a portion fixed to the crucible body. The lid assembly includes a placement hole having open upper and lower ends, a frame member arranged along a periphery of the opening while surrounding a periphery of the placement hole, and a core member located in the placement hole and movable upward and downward with respect to the frame member.
Claims17
An apparatus for producing an ingot, comprising:
- a crucible body comprising an opening and in which raw materials are accommodated;
- a lid assembly located at the opening and comprising a portion fixed to the crucible body;
- and
- a seed crystal fixing unit located at a top end of the crucible body or between the crucible body and the lid assembly and comprising a seed crystal,
- wherein the lid assembly comprises:
- a placement hole comprising open upper and lower ends;
- a frame member arranged along a periphery of the opening while surrounding a periphery of the placement hole;
- and
- a core member located in the placement hole and movable upward and downward with respect to the frame member,
- wherein the seed crystal fixing unit and the core member meet each other at one or more points and a space is present between the seed crystal fixing unit and the core member, and wherein an outer periphery of a lower surface of the core member is spaced apart from the periphery of the placement hole by a predetermined gap.
An apparatus for producing an ingot, comprising:
- a crucible comprising an opening and in which raw materials are accommodated;
- a lid assembly disposed on the crucible, wherein the lid assembly comprises:
- a placement hole;
- a core member disposed in the placement hole to move up to increase volume in the crucible and move down to decrease volume in the crucible;
- a seed crystal fixing unit disposed in the crucible in contact with the core member;
- a space disposed between the core member and the seed crystal fixing unit;
- and
- a frame member arranged along a periphery of the opening while surrounding a periphery of the placement hole,
- wherein the seed crystal fixing unit and the core member meet each other at one or more points, and
- wherein an outer periphery of a lower surface of the core member is spaced apart from the periphery of the placement hole by a predetermined gap.
Dependencies are inferred from the claim text.