# US 11,078,571 B2 · Deposition apparatus including a heat dissipation member > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,078,571 B2 - Document ID: US11078571B2 - Status: Granted - Kind: B2 - Application number: 16/709,152 - Filed: 2019-12-10 - Published: 2020-06-18 - Granted: 2021-08-03 - Earliest claimed: 2018-12-12 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Jongho Park; Sook-hwan Ban; Jinoh Song; Hyeongsuk Yoo - Web page: https://patentgrep.com/patent/US11078571B2 ## CPC - C23C 16/45572: {Cooled nozzles} - C23C 16/45565: {Shower nozzles} - H01J 37/3244: {Gas supply means} - H01J 2237/3321: CVD [Chemical Vapor Deposition] - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A deposition apparatus includes a chamber, a deposition source, and a stage disposed in the chamber with a target object mounted thereon. The deposition apparatus further includes a first plate coupled to the chamber, and a second plate disposed between the first plate and the stage, wherein the second plate includes a plurality of diffusion holes. The deposition apparatus additionally includes a heat dissipation member in contact with the first plate and the second plate, wherein the heat dissipation member includes a plurality of sidewall portions, wherein the plurality of sidewall portions are connected to each other. The deposition apparatus further includes a spacer coupled to a first sidewall portion of the plurality of sidewall portions and disposed between the first plate and the second plate, wherein the spacer extends parallel to the first sidewall portion. ## Claims ### Claim 1 A deposition apparatus, comprising: a chamber; a deposition source including a deposition material; a stage disposed in the chamber with a target object mounted thereon; a first plate coupled to the chamber to define a space; a second plate disposed between the first plate and the stage, wherein the second plate includes a plurality of diffusion holes provided therein; a heat dissipation member in contact with the first plate and the second plate, wherein the heat dissipation member includes a plurality of sidewall portions, wherein the plurality of sidewall portions are connected to each other to form a frame shape enclosing outer side surfaces of the first plate and the second plate; and a spacer coupled to a first sidewall portion of the plurality of sidewall portions and disposed between the first plate and the second plate, wherein the spacer extends parallel to the first sidewall portion, wherein an extension length of the spacer is shorter than an extension length of the first sidewall portion. ### Claim 2 (depends on 1) The deposition apparatus of claim 1, wherein the spacer is disposed on a center region of the first sidewall portion. ### Claim 3 (depends on 1) The deposition apparatus of claim 1, wherein the spacer is in direct contact with the first plate and the second plate. ### Claim 4 (depends on 1) The deposition apparatus of claim 1, wherein the second plate comprises first sides, opposite to each other, extending in a first direction and second sides, opposite to each other, extending in a second direction crossing the first direction, wherein the spacer is a plurality of spacers, wherein the plurality of spacer comprises: first spacers extending along the first sides and facing each other; and second spacers extending along the second sides and facing each other, and wherein an extension length of each of the second spacers is shorter than an extension length of each of the first spacers. ### Claim 5 (depends on 4) The deposition apparatus of claim 4, wherein a ratio of an extension length of each of the first spacers to a length of the first side of the second plate ranges from about 60% to about 70%. ### Claim 6 (depends on 4) The deposition apparatus of claim 4, wherein a ratio of an extension length of each of the second spacers to a length of the second side of the second plate ranges from about 20% to about 30%. ### Claim 7 (depends on 1) The deposition apparatus of claim 1, wherein the second plate comprises: a diffusion part including the plurality of diffusion holes; and a peripheral part enclosing the diffusion part, wherein the spacer is disposed on the peripheral part. ### Claim 8 (depends on 1) The deposition apparatus of claim 1, wherein the heat dissipation member further comprises a plurality of bottom portions, wherein each of the plurality of bottom portions is bent from a bottom end of each of the sidewall portions and is disposed below the second plate, and each of the sidewall portions comprises: a first portion including an inner side surface connected to the first plate; a second portion coupled to a bottom end of the first portion and including an inner side surface coupled to the spacer; and a third portion connecting a bottom end of the second portion to the bottom portion of the heat dissipation member, wherein an inner side surface of the third portion is connected to the second plate. ### Claim 9 (depends on 1) The deposition apparatus of claim 1, wherein the spacer comprises a metallic material. ### Claim 10 (depends on 1) The deposition apparatus of claim 1, wherein the spacer comprises substantially a same material as that of the heat dissipation member. ### Claim 11 (depends on 1) The deposition apparatus of claim 1, wherein the second plate and the heat dissipation member are a single object. ### Claim 12 (depends on 1) The deposition apparatus of claim 1, wherein a bore penetrates the first plate, and wherein the deposition apparatus further comprises a cylinder connected to the deposition source and surrounding the bore. ### Claim 13 (depends on 1) The deposition apparatus of claim 1, further comprising a voltage generator electrically connected to the second plate and configured to provide a voltage to the second plate to produce an electric field between the second plate and the stage. ### Claim 14 (depends on 1) The deposition apparatus of claim 1, wherein the spacer has a hexahedral shape. ### Claim 15 (depends on 1) The deposition apparatus of claim 1, wherein the spacer comprises a curved surface. ### Claim 16 (depends on 11) The deposition apparatus of claim 11, wherein the spacer includes tapered ends. ### Claim 17 A deposition apparatus, comprising: a chamber; a deposition source including a deposition material; a stage disposed in the chamber, wherein a target object is disposed on the stage and includes a deposition region; a first plate facing the stage and coupled to the chamber to define a space; a second plate disposed between the first plate and the stage; a heat dissipation member connected to the first plate and the second plate, wherein the heat dissipation member comprises a plurality of sidewall portions that form a frame shape enclosing outer side surfaces of the first plate and the second plate; and a plurality of spacers disposed between the first plate and the second plate, wherein each of the plurality of spacers is coupled to a sidewall portion of the plurality of sidewall portions and, and each of the plurality of spacers has a rod shape extending along the plurality of sidewall portions, wherein the second plate comprises: a diffusion part overlapping the deposition region, wherein a plurality of diffusion holes are provided in the diffusion part; and a peripheral part at least partially surrounding the diffusion part, wherein the plurality of spacers are spaced apart from each other on the peripheral part and are in direct contact with the first plate and the second plate. ### Claim 18 (depends on 17) The deposition apparatus of claim 17, wherein each of the spacers is disposed on a center region of an inner side surface of a corresponding one of the plurality of sidewall portions. ### Claim 19 (depends on 18) The deposition apparatus of claim 18, wherein the spacers comprise a metallic material. ### Claim 20 A deposition apparatus, comprising: a chamber; a deposition source including a deposition material; a stage disposed in the chamber, wherein a target object is mounted on the stage and includes a deposition region; a first plate overlapping the stage and coupled to the chamber to define a space; a second plate disposed between the first plate and the stage, wherein the second plate comprises a first side extending in a first direction and a plurality of diffusion holes overlapping the deposition region; a heat dissipation member connected to the first plate and the second plate, wherein the heat dissipation member includes a first sidewall portion extending in the first direction; and a first spacer coupled to the first sidewall portion of the heat dissipation member and disposed between the first plate and the second plate, wherein the first spacer has a rectangular shape extending in the first direction, wherein a length of the first spacer in the first direction is shorter than a length of the first side in the first direction.