# US 11,078,224 B2 · Precursors for the atomic layer deposition of transition metals and methods of use

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- Number: US 11,078,224 B2
- Document ID: US11078224B2
- Status: Granted
- Kind: B2
- Application number: 15/947,697
- Filed: 2018-04-06
- Published: 2018-10-11
- Granted: 2021-08-03
- Earliest claimed: 2017-04-07
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Jeffrey W. Anthis; Atashi Basu
- Web page: https://patentgrep.com/patent/US11078224B2

## CPC

- C07F 15/06: Cobalt compounds
- C07F 7/0812: {comprising a heterocyclic ring}
- C07F 13/00: Compounds containing elements of Groups 7 or 17 of the Periodic Table
- C07F 15/0006: {compounds of the platinum group}
- C07F 15/02: Iron compounds
- C07F 15/04: Nickel compounds
- C23C 16/18: from metallo-organic compounds
- C23C 16/45553: {characterized by the use of precursors specially adapted for ALD}
- C07F: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM (metal-containing porphyrins C07D487/22)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

Metal coordination complexes comprising at least one diazabutadiene based ligand having a structure represented by: where A1, A2, A3, and A4 are atoms in a 6-membered ring and are independently selected from C, N, O, S, and P; and where R1, R2, R3, R4, R5, and R6 are independently selected from the group consisting of H, amino groups, C1-C6 alkyl groups, or C4-10 cycloalkyl groups; and further provided that alkyl groups may optionally contain silicon; and where the metal coordination complex is capable of participating in a Diels-Alder type reaction with a dienophile. Processing methods using the metal coordination complexes are also described.

## Claims

### Claim 1

A processing method comprising exposing a substrate to a first reactive gas comprising a metal coordination complex and a second reactive gas comprising a dienophile comprising one or more of an alkene, an alkyne or plasma thereof to form a metal-containing film through a Diels-Alder reaction, the metal coordination complex comprising at least one ligand according to
wherein A1, A2, A3, and A4 are atoms in a 6-membered ring and are independently selected from C, N, O, S, and P;
wherein R1, R2, R3, R4, R5, and R6 are independently selected from the group consisting of H, amino groups, C1-C6 alkyl groups, or C4-10 cycloalkyl groups; and
further provided that alkyl groups may optionally contain silicon.

### Claim 2 (depends on 1)

The method of claim 1, wherein the substrate is exposed to the first reactive gas and the second reactive gas sequentially.

### Claim 3 (depends on 1)

The method of claim 1, wherein the substrate is exposed to the first reactive gas and the second reactive gas simultaneously.

### Claim 4 (depends on 1)

The method of claim 1, wherein the Diels-Alder reaction produces a quinoxaline derivative.

### Claim 5 (depends on 1)

The method of claim 1, wherein the metal-containing film comprises greater than or equal to about 95 percent metal.

### Claim 6 (depends on 1)

The method of claim 1, wherein the metal is selected from the transition metals from Groups 7 to 11 on the Periodic Table.