# US 11,078,112 B2 · Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same

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- Number: US 11,078,112 B2
- Document ID: US11078112B2
- Status: Granted
- Kind: B2
- Application number: 15/978,430
- Filed: 2018-05-14
- Published: 2018-11-29
- Granted: 2021-08-03
- Earliest claimed: 2017-05-25
- Assignees: Corning Incorporated
- Applicants: Corning Incorporated
- Inventors: Rachel Eileen Dahlberg; Tian Huang; Yuhui Jin; Garrett Andrew Piech; Daniel Ohen Ricketts
- Web page: https://patentgrep.com/patent/US11078112B2

## CPC

- H10W 70/692: Ceramics or glasses
- B23K 26/0006: {taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence)}
- B23K 26/06: Shaping the laser beam, e.g. by masks or multi-focusing
- B23K 26/062: by direct control of the laser beam
- B23K 26/402: involving non-metallic material, e.g. isolators
- B23K 26/53: for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
- B23K 26/55: for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
- C03C 15/00: Surface treatment of glass, not in the form of fibres or filaments, by etching (etching or surface-brightening compositions, in general C09K13/00)
- C03C 23/0025: {by a laser beam}
- B23K 26/0617: {and with spots spaced along the common axis}
- B23K 26/0622: by shaping pulses
- B23K 26/0624: {using ultrashort pulses, i.e. pulses of 1 ns or less}
- B23K 26/0626: {Energy control of the laser beam (B23K26/0622 takes precedence)}
- B23K 26/064: by means of optical elements, e.g. lenses, mirrors or prisms
- B23K 26/0738: {into a linear shape}
- B23K 26/36: Removing material (B23K26/55, B23K26/57 take precedence)
- B23K 2103/54: {Glass}
- H05K 2201/09827: Tapered, e.g. tapered hole, via or groove
- H05K 2201/09854: Hole or via having special cross-section, e.g. elliptical
- H10W 20/20: Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
- H10W 70/095: {of vias therein}
- H10W 70/611: {for connecting multiple chips together}
- H10W 70/635: {Through-vias}
- H10W 70/65: Shapes or dispositions of interconnections
- Y10T 428/24273: including aperture
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

Silica-containing substrates including vias with a narrow waist, electronic devices incorporating a silica-containing substrate, and methods of forming vias with narrow waist in silica-containing substrates are disclosed. In one embodiment, an article includes a silica-containing substrate including greater than or equal to 85 mol % silica, a first surface, a second surface opposite the first surface, and a via extending through the silica-containing substrate from the first surface toward the second surface. The via includes a first diameter at the first surface wherein the first diameter is less than or equal to 100 μm, a second diameter at the second surface wherein the first diameter is less than or equal to 100 μm, and a via waist between the first surface and the second surface. The via waist has a waist diameter that is less than the first diameter and the second diameter such that a ratio between the waist diameter and each of the first diameter and the second diameter is less than or equal to 75%.

## Claims

### Claim 1

A method for processing a substrate comprising silica content of greater than or equal to 90 mol %, a first surface, and a second surface opposite the first surface, the method comprising:
forming, using a laser beam with a substantially uniform intensity, a damage track through the substrate from the first surface to the second surface, the laser beam comprising a pulsed laser beam focused into a laser beam focal line that is positioned through the substrate, the laser beam focal line producing a material modification within the substrate along the laser beam focal line, thereby forming the damage track, wherein a level of modification of the substrate along the damage track decreases in a first direction starting from the first surface toward a bulk of the substrate, and the level of modification along the damage track decreases in a second direction starting from the second surface toward a bulk of the substrate such that the damage track comprises:
a first highly modified segment proximate the first surface,
a second highly modified segment proximate the second surface,
a minimally modified segment disposed between the first highly modified segment and the second highly modified segment,
etching, using an etching solution, the substrate such that the first highly modified segment and the second highly modified segment are each etched ata faster rate than a minimally modified segment,
wherein etching forms a via comprising a first diameter at the first surface, a second diameter at a second surface, and a via waist having a water diameter between the first surface and the second surface, wherein the waist diameter is about 55% or less of each of the first diameter and the second diameter.

### Claim 2 (depends on 1)

The method of claim 1, wherein the silica content of the substrate is greater than 95 mol %.

### Claim 3 (depends on 2)

The method of claim 2, wherein the silica content of the substrate is greater than 99 mol %.

### Claim 4 (depends on 1)

The method of claim 1, wherein the first highly modified segment, the second highly modified segment, and the minimally modified segment each extend linearly in length from the first surface to the second surface.

### Claim 5 (depends on 1)

The method of claim 1, wherein at least a portion of the substrate within the minimally modified segment of the damage track is not modified by the laser beam.

### Claim 6 (depends on 1)

The method of claim 1, wherein the first highly modified segment and the second highly modified segment are each etched at a faster rate than the minimally modified segment such that the first highly modified segment and the second highly modified segment each have a higher rate of expansion than the minimally modified segment during the etching.

### Claim 7 (depends on 1)

The method of claim 1, wherein a diameter of each of the first highly modified segment, the second highly modified segment, and the minimally modified segment is about 1% of the first diameter and of the second diameter.

### Claim 8 (depends on 1)

The method of claim 1, wherein the waist diameter is greater than a diameter of each of the first highly modified segment, the second highly modified segment, and the minimally modified segment.

### Claim 9 (depends on 1)

The method of claim 1 wherein the via waist is located closer to one of the first surface and the second surface than the other of the first surface and the second surface.

### Claim 10 (depends on 1)

The method of claim 1, wherein a ratio between the waist diameter and the first diameter or the second diameter is greater than or equal to 35% and less than or equal to 45%.

### Claim 11 (depends on 1)

The method of claim 1, wherein the first diameter and the second diameter are each about 100 microns or less.

### Claim 12 (depends on 1)

The method of claim 1, wherein:
the via comprises a longitudinal axis, an interior wall, a first tapered region located between the first surface and the via waist and a second tapered region located between the second surface and the via waist;
the first tapered region comprises a first angle measured between the interior wall within the first tapered region and the longitudinal axis; and
the second tapered region comprises a second angle measured between the interior wall within the second tapered region and the longitudinal axis.

### Claim 13 (depends on 1)

The method of claim 1, wherein the laser beam is operated such that:
the damage track comprises an additional minimally modified segment located between the minimally modified segment and the second highly modified segment; and
the level of modification of the additional minimally modified segment is less than the level of modification of the first highly modified segment and the second highly modified segment.

### Claim 14 (depends on 13)

The method of claim 13, wherein:
the via comprises:
a longitudinal axis;
an interior wall;
a first tapered region located proximate the first surface, the first tapered region comprising a first angle measured between the interior wall within the first tapered region and the longitudinal axis;
a second tapered region located between the first tapered region and the via waist, the second tapered region comprising a second angle measured between the interior wall within the second tapered region and the longitudinal axis;
a third tapered region adjacent the via waist, the third tapered region comprising a third angle measured between the interior wall within the third tapered region and the longitudinal axis; and
a fourth tapered region located between the third tapered region and the second surface, the fourth tapered region comprising a fourth angle measured between the interior wall within the fourth tapered region and the longitudinal axis; and
each of the second angle and the third angle is less than the first angle and the fourth angle.

### Claim 15 (depends on 1)

The method of claim 1, wherein:
the laser beam focal line generates an induced multi-photon absorption within the substrate, the induced multi-photon absorption producing the material modification within the substrate along the laser beam focal line.

### Claim 16 (depends on 15)

The method of claim 15, wherein the first surface of the substrate faces an ultra-short pulse laser source that emits the laser beam.

### Claim 17 (depends on 15)

The method of claim 15, wherein the pulsed laser beam comprises a pulse burst comprising a series of sub-pulses, each sub-pulse being separated in time from a subsequent sub-pulse in the pulse burst by a duration (tp) from 1 nsec to 50 nsec.

### Claim 18 (depends on 15)

The method of claim 15, further comprising adjusting a temperature of one or more of the first surface and the second surface while forming the damage track using the laser beam.

### Claim 19 (depends on 1)

The method of claim 1, wherein using the etching solution comprises by spraying the etching solution on the substrate or disposing the substrate in a bath containing the etching solution.

### Claim 20 (depends on 1)

The method of claim 1, wherein the etching solution comprises hydrofluoric acid (HF) in combination with hydrochloric acid (HCl) or nitric acid (HNO3) or sodium/potassium hydroxide (NaOH/KOH).