# US 11,077,535 B2 · Process system having locking pin and locking pin > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,077,535 B2 - Document ID: US11077535B2 - Status: Granted - Kind: B2 - Application number: 15/897,133 - Filed: 2018-02-14 - Published: 2019-08-15 - Granted: 2021-08-03 - Earliest claimed: 2018-02-14 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Hector Lopez; Juan Moncada - Web page: https://patentgrep.com/patent/US11077535B2 ## CPC - B24B 55/00: Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition (of general applicability for machine tools B23Q11/00; in general F16P) - B24B 37/34: Accessories - F16P 3/008: {Devices for directly stopping or interrupting the drive or gear in case of danger to the machine, e.g. devices with clutches} - H10P 72/00: Handling or holding of wafers, substrates or devices during manufacture or treatment thereof - H10P 72/0464: {characterised by the construction of the transfer chamber} - H10P 72/3302: {Mechanical parts of transfer devices} - H10P 72/3304: {characterised by movements or sequence of movements of transfer devices} - H10P 72/3402: {Mechanical parts of transfer devices} - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - H10P 90/00: Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement - B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS - F16P: SAFETY DEVICES IN GENERAL; {SAFETY DEVICES FOR PRESSES} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A process system of performing a fabrication process on a wafer includes a wafer storage cassette, one or more process chambers, a transfer chamber having a body and a lid that detachably covers the body, and a locking pin. The transfer chamber also includes a robot hub, a robot arm attached to the robot hub, and a blade attached to the robot arm. The body of the transfer chamber is connected to the wafer storage cassette and the process chambers, and the robot arm is configured to transfer a wafer from the wafer storage cassette through the body of the transfer chamber to one or more of the process chambers. The locking pin is configured to detachably attach to the robot arm to constrain the blade at a predetermined position within the transfer chamber. ## Claims ### Claim 1 A processing system for performing a fabrication process on a wafer, the processing system comprising: a wafer storage cassette that receives at least one wafer; one or more process chambers; a transfer chamber having a body, a robot huh, a robot arm attached to the robot hub such that the arm can be extended into a position outward from the robot hub or contracted in a position toward the robot huh for moving a blade attached to the robot arm between an extended or contracted position, wherein the body of the transfer chamber is connected to the wafer storage cassette and the one or more process chambers, and the robot arm is configured to transfer the wafer on the blade from the wafer storage cassette through the body of the transfer chamber to one or more of the process chambers; and a locking pin that detachably attaches to the robot arm when the robot arm is in the contracted position and when attached with the robot arm constrains the robot arm from extending and thereby contra ins the blade from moving or extending in a radial direction from the robot hub toward the body of the transfer chamber and constrains the blade at a predetermined position of the blade within the transfer chamber to prevent the blade from colliding with the body of the transfer chamber. ### Claim 2 (depends on 1) The processing system of claim 1, wherein the blade is formed of a ceramic material. ### Claim 3 (depends on 1) The processing system of claim 1, wherein the locking pin is formed of Teflon. ### Claim 4 (depends on 1) The processing system of claim 1, wherein the locking pin includes a handle and a plurality of fingers that extend from the handle, and the fingers engage the robot arm to constrain the robot arm at a predetermined position of the robot arm. ### Claim 5 (depends on 4) The processing system of claim 4, wherein the plurality of fingers have four fingers separated from each other. ### Claim 6 (depends on 4) The processing system of claim 4, wherein the locking pin comprises a first side and a second side, the plurality of fingers extend from the handle in a first direction that is parallel to a surface of the first side and a surface of the second side, a first sidewall of a finger on the first side of the locking pin comprises a first width in a second direction that is perpendicular to the first direction, the first width is greater than a second width of a second sidewall of the finger in the second direction, the second sidewall is opposite the first sidewall, a third sidewall of the finger extends between the first sidewall and the second sidewall, and the third sidewall extends a predetermined angle from the first sidewall. ### Claim 7 (depends on 6) The processing system of claim 6, wherein the predetermined angle is about 27 degrees from the first sidewall. ### Claim 8 (depends on 4) The processing system of claim 4, wherein at least two fingers of the plurality of fingers have different thickness from each other. ### Claim 9 (depends on 4) The processing system of claim 4, wherein the locking pin further includes an area on a surface of the locking pin having a different color from a color of the handle.