# US 11,077,410 B2 · Gas injector with baffle > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,077,410 B2 - Document ID: US11077410B2 - Status: Granted - Kind: B2 - Application number: 16/116,531 - Filed: 2018-08-29 - Published: 2019-04-11 - Granted: 2021-08-03 - Earliest claimed: 2017-10-09 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Vishwas Kumar Pandey; Lara Hawrylchak; Eric Kihara Shono; Kartik Shah; Christopher S. Olsen; Sairaju Tallavarjula; Kailash Pradhan; Rene George; Johanes F. Swenberg; Stephen Moffatt - Web page: https://patentgrep.com/patent/US11077410B2 ## CPC - B01F 23/191: {characterised by the construction of the controlling means} - B01J 4/002: {Nozzle-type elements (nozzle-type reactors B01J19/26)} - B01J 4/005: {provided with baffles} - B01J 4/007: {provided with moving parts} - B01J 8/22: gas being introduced into the liquid - C23C 16/45563: {Gas nozzles} - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - B01J 2208/00902: Nozzle-type feeding elements - B01J 2208/00929: Provided with baffles - B01F: MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING (mixing paints B44D3/06) - B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition. ## Claims ### Claim 1 A gas injector comprising: a plenum body, wherein the body comprises: a top surface and a bottom surface opposite the top surface; a recess formed into the top surface; and a protrusion adjacent to the recess and extending laterally away from the bottom surface of the plenum body, wherein the protrusion comprises: a divider disposed across an interior volume of the plenum body separating the interior volume into a first volume adjacent to the recess and a second volume extending into the protrusion, wherein the divider has a plurality of holes that provide fluid communication between the first volume and the second volume; a side wall and a bottom wall orthogonal to the side wall; and an opening formed through the side wall and in fluid communication with the second volume. ### Claim 2 (depends on 1) The gas injector of claim 1, further comprising a textured surface or coating on an interior surface of the protrusion, the interior surface surrounding the second volume, wherein the textured surface or coating has projections extending away from the interior surface. ### Claim 3 (depends on 2) The gas injector of claim 2, wherein the projections extend from the interior surface a distance between about 25 microns and about 100 microns. ### Claim 4 A gas injector comprising: a plenum body, wherein the plenum body comprises: a top surface and a bottom surface opposite the top surface; a recess formed into the top surface; and a protrusion adjacent to the recess and extending laterally away from the bottom surface of the plenum body, wherein the protrusion comprises: a plurality of holes formed within a divider; and a baffle adjacent the plurality of holes, wherein the plurality of holes provides fluid communication between an interior volume of the plenum body and the baffle, and wherein the interior volume extends from the recess, through the plenum body and the lower surface, and into the protrusion; and an opening formed through a side wall of the protrusion and in fluid communication with the interior volume. ### Claim 5 (depends on 4) The gas injector of claim 4, wherein the baffle comprises a first extension and a second extension orthogonal the first extension. ### Claim 6 (depends on 5) The gas injector of claim 5, wherein the first extension connects to a bottom surface of the protrusion. ### Claim 7 (depends on 6) The gas injector of claim 6, wherein the second extension is spaced from the protrusion by a distance of about 0.04 inches to about 0.05 inches. ### Claim 8 (depends on 4) The gas injector of claim 4, wherein the plurality of holes is disposed on a bottom surface of the protrusion. ### Claim 9 (depends on 8) The gas injector of claim 8, wherein the plurality of holes is centrally located within the bottom surface of the protrusion. ### Claim 10 (depends on 4) The gas injector of claim 4, wherein the plenum body further comprises another plurality of holes which disposed in a top surface of the plenum body. ### Claim 11 (depends on 4) The gas injector of claim 4, further comprising a textured surface or coating on an interior surface of the protrusion, the interior surface surrounding the interior volume, wherein the textured surface or coating has projections extending away from the interior surface. ### Claim 12 (depends on 11) The gas injector of claim 11, wherein the projections extend from the interior surface a distance between about 25 microns and about 100 microns. ### Claim 13 A gas injector comprising: a plenum body, wherein the plenum body comprises: a recess; a protrusion adjacent to the recess and extending laterally away from the plenum body, wherein the protrusion comprises: a divider disposed across an interior volume of the plenum body separating the interior volume into a first volume adjacent to the recess and a second volume extending into the protrusion, wherein the divider has a plurality of holes that provide fluid communication between the first volume and the second volume; a side wall and a bottom wall orthogonal to the side wall; and an opening formed through the side wall and in fluid communication with the second volume. ### Claim 14 (depends on 13) The gas injector of claim 13, wherein the second volume is within the protrusion. ### Claim 15 (depends on 13) The gas injector of claim 13, wherein the opening is disposed in a side wall of the protrusion. ### Claim 16 (depends on 13) The gas injector of claim 13, wherein the divider is spaced from a bottom surface of the protrusion by a distance of about 0.04 inches to about 0.60 inches. ### Claim 17 (depends on 13) The gas injector of claim 13, further comprising a textured surface or coating on an interior surface of the protrusion, the interior surface surrounding the second volume, wherein the textured surface or coating has projections extending away from the interior surface. ### Claim 18 (depends on 17) The gas injector of claim 17, wherein the projections extend from the interior surface a distance between about 25 microns and about 100 microns. ### Claim 19 (depends on 18) The gas injector of claim 18, wherein the plenum body further comprises a plurality of holes disposed in a top surface of the plenum body.