# US 11,076,775 B2 · Strain sensor unit and skin sensor module comprising the same

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- Number: US 11,076,775 B2
- Document ID: US11076775B2
- Status: Granted
- Kind: B2
- Application number: 16/372,150
- Filed: 2019-04-01
- Published: 2019-07-25
- Granted: 2021-08-03
- Earliest claimed: 2017-11-09
- Assignees: Amorepacific Corporation; Massachusetts Institute of Technology
- Applicants: Amorepacific Corporation; Massachusetts Institute of Technology
- Inventors: Jiyeon Han; Han-Wool Yeun; Eunjoo Kim; Jeehwan Kim; Kyusang Lee; Haekwang Lee
- Web page: https://patentgrep.com/patent/US11076775B2

## CPC

- A61B 5/103: Measuring devices for testing the shape, pattern, {colour,} size or movement of the body or parts thereof, for diagnostic purposes (measuring instruments specially adapted for dentistry A61C19/04)
- A61B 5/00: Measuring for diagnostic purposes (radiation diagnosis A61B6/00; diagnosis by ultrasonic, sonic or infrasonic waves A61B8/00); Identification of persons
- A61B 5/442: {Evaluating skin mechanical properties, e.g. elasticity, hardness, texture, wrinkle assessment}
- A61B 5/6814: {Head}
- A61B 5/6824: {Arm or wrist}
- A61B 5/6833: {Adhesive patches}
- G01L 1/16: using properties of piezoelectric devices
- G01L 1/18: using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
- G01L 5/162: of piezoresistors
- G01L 5/167: using piezoelectric means
- H10N 30/072: by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N 30/302: {Sensors}
- H10N 30/706: {characterised by the underlying bases, e.g. substrates}
- H10N 30/875: {Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins}
- H10N 30/88: Mounts; Supports; Enclosures; Casings
- H10N 39/00: Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
- A61B 5/6831: {Straps, bands or harnesses}
- A61B 2562/0261: Strain gauges
- A61B 2562/04: Arrangements of multiple sensors of the same type
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

A strain sensor unit and a skin sensor module comprising the same are provided. The strain sensor unit according to an embodiment of the present disclosure includes a substrate having a through-hole, and including a first electrode and a second electrode formed at one side and the other side of the through-hole on one surface of the substrate, a piezoelectric device drawn from the first electrode and extending inward the through-hole, and a piezoresistor drawn from the second electrode and extending inward the through-hole, wherein the piezoresistor overlaps with a whole or part of the piezoelectric device.

## Claims

### Claim 1

A skin sensor module comprising:
a substrate having a plurality of through-holes; and
a plurality of strain sensor units located at the plurality of through-holes, respectively, each strain sensor unit comprising:
a piezoelectric device located at one side of the through-hole on the substrate, and extending toward another side of the through-hole;
a piezoresistor located at another side of the through-hole on the substrate, and extending toward one side of the through-hole;
a first electrode located on the piezoelectric device; and
a second electrode located on the piezoresistor,
wherein the piezoresistor overlaps with a whole or part of the piezoelectric device, and
wherein the piezoresistor is a nanocrack-control based metal piezoresistive device.

### Claim 2 (depends on 1)

The skin sensor module according to claim 1, wherein the piezoelectric device is a piezoelectric semiconductor.

### Claim 3 (depends on 1)

The skin sensor module according to claim 1, wherein an interfacial layer made of amorphous oxide semiconductor is further formed on a contact surface between the piezoelectric device and the piezoresistor.

### Claim 4 (depends on 1)

The skin sensor module according to claim 1, wherein the substrate has a plurality of air permeable holes having the diameter of 50 to 150 pm.

### Claim 5 (depends on 4)

The skin sensor module according to claim 4, wherein a distance between the plurality of air permeable holes is 50 to 150 μm.

### Claim 6 (depends on 4)

The skin sensor module according to claim 4, wherein all or some of the plurality of air permeable holes comprise the plurality of through-holes.

### Claim 7 (depends on 1)

The skin sensor module according to claim 1, wherein the substrate is made of a material including polydimethylsiloxane (PDMS).

### Claim 8 (depends on 1)

The skin sensor module according to claim 1, wherein a plurality of micro suction cups is patterned on a surface opposite to one surface of the substrate to be attached to the skin.

### Claim 9 (depends on 1)

The skin sensor module according to claim 1, wherein the plurality of strain sensor units are arranged at centers of the plurality of through-holes that are formed on the substrate, respectively, and
wherein the plurality of strain sensor units are arranged on the substrate in at least one array structure of a radial array structure, a linear array structure, a curved array structure, a crossed array structure, a circular array structure, a rectangular array structure, and a polygonal array structure.