Rare earth thin film magnet and method for producing same
AssigneeJX Nippon Mining & Metals Corporation
InventorsMasaki Nakano, Hirotoshi Fukunaga, Takeshi Yanai, Hironobu Sawatari
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Abstract
Provided is a rare earth thin film magnet having Nd, Fe and B as essential components, which is characterized in that a Nd—Fe—B base film is formed on a Si substrate having an oxide film formed on a surface thereof and has a composition in which the Nd content is higher than that of a stoichiometric composition and that a film (nano composite film) is formed on the base film and has a texture in which an α-Fe phase and Nd2Fe14B are alternately arranged and three-dimensionally dispersed. The rare earth thin film magnet provided is less susceptible to the occurrence of film separation and substrate breakage and exhibits favorable magnetic properties.
Claims17
A rare earth thin film magnet having Nd, Fe and B as essential components comprising:
- a Nd—Fe—B base film on a Si substrate having an oxide film formed on a surface thereof;
- the Nd—Fe—B base film has a composition in which a Nd content is higher than that of a stoichiometric composition of Nd2—Fe14—B;
- nano composite film having a film thickness of 10 μm or more and 42 μm or less on the base film, and
- the nano composite film has a texture in which an α-Fe phase and Nd2Fe14B are alternately arranged and three-dimensionally dispersed.
A method of producing a rare earth thin film magnet, the method comprising:
- forming an oxide film on a Si substrate;
- forming a Nd—Fe—B base film having a composition in which a Nd content is higher than that of a stoichiometric composition of Nd2—Fe14—B on the Si substrate, as a first layer via pulsed laser deposition;
- forming a nano composite film having a film thickness of 10 μm or more and 42 μm or less and having a texture in which an α-Fe phase and Nd2Fe14B are alternately arranged and three-dimensionally dispersed on the first layer, as a second layer via pulsed laser deposition;
- and
- thereafter performing heat treatment thereto.
Dependencies are inferred from the claim text.