Fluidized bed reaction container and method for producing trichlorosilane
AssigneeTokuyama Corporation
InventorsKenji Hirota, Katsuya Ogihara
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AssigneeTokuyama Corporation
InventorsKenji Hirota, Katsuya Ogihara
Estimating the term…
To provide a fluidized-bed reaction vessel and a trichlorosilane production method each of which can reduce corrosion and wear of a reaction container inner wall, a fluidized-bed reaction vessel causes metallurgical grade silicon powder and hydrogen chloride gas to react with each other for production of trichlorosilane. The fluidized-bed reaction vessel includes a plurality of ejection nozzles (20) standing on a distributor plate (11) as a bottom surface of a container body. The ejection nozzles (20) each have a gas ejection opening (22a) configured to allow hydrogen chloride gas to be ejected sideways. The plurality of ejection nozzles (20) include a first ejection nozzle (20a) adjacent to an outer wall (10a) of the container body, the first ejection nozzle (20a) having a gas ejection opening (22a) in such a pattern as to prevent hydrogen chloride gas from being ejected toward the outer wall (10a).
A fluidized-bed reaction vessel configured to cause metallurgical grade silicon powder and hydrogen chloride gas to react with each other for production of trichlorosilane, the fluidized-bed reaction vessel comprising:
Dependencies are inferred from the claim text.