Filter membrane
AssigneeIbiden Co., Ltd.
InventorsMasatoshi Kunieda, Hirokazu Higashi, Tatsuhiro Kawai
Life of this patent
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AssigneeIbiden Co., Ltd.
InventorsMasatoshi Kunieda, Hirokazu Higashi, Tatsuhiro Kawai
Estimating the term…
A filter membrane includes a membrane having through holes that selectively separates specific material in processing medium, the membrane including first, second and third layers such that the first layer has first surface that is supplied with processing medium, the third layer has second surface on the opposite side of the first surface, and the second layer is formed between the first and third layers. The first layer includes first convex and concave portions, the third layer includes second convex and concave portions each having a larger area than each first concave portion, the second convex portions are formed to surround the second concave portions and connected to one another, the second layer has through holes connecting the second concave portions and first set of the first concave portions, and the first concave portions include second set in regions opposing the second convex portions that is connected to each other.
A filter membrane, comprising:
Dependencies are inferred from the claim text.