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US 11,069,503 B2Granted
Electron generating apparatus and ionization gauge
AssigneeCanon Anelva Corporation
InventorsNoriyuki Saito, Kyuma Iizuka, Eriko Chida
Life of this patent
Estimating the term…
Abstract
An electron generating apparatus includes a filament, a power supply configured to supply power to the filament so as to make the filament emit an electron, and a controller configured to repeatedly detect a value having a correlation with power supplied from the power supply to the filament, determine whether a state of the filament satisfies a notification condition, by using a plurality of detected values, and perform notification when the state satisfies the notification condition.
Claims19
An electron generating apparatus comprising:
- a filament;
- a power supply configured to supply power to the filament so as to make the filament emit an electron;
- and
- a controller configured to repeatedly detect a value having a correlation with power supplied from the power supply to the filament, determine whether a state of the filament satisfies a notification condition, by using a plurality of detected values, and perform notification when the state satisfies the notification condition.
1 more element
An electron generating apparatus comprising:
- a filament;
- a power supply configured to supply power to the filament so as to make the filament emit an electron;
- and
- a controller configured to perform notification to prompt to replace the filament based on a value having a correlation with power supplied from the power supply to the filament,
- wherein the controller does not perform the notification until a lapse of a predetermined time since the power supply is turned on.
2 more elements
Dependencies are inferred from the claim text.