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US 11,067,390 B2Granted
Method for gauging surfaces with classification of measurements as valid or non-valid
AssigneeHexagon Technology Center GmbH
InventorsFrank Przygodda, Thomas Jensen
Life of this patent
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Abstract
A method for measurement of a surface, in particular according to the principle of Optical Coherence Tomography, whereby distances to points of the surface are measured based on interferograms and classifying of measurements as non-valid or valid based on evaluation of phase change or amplitude change of a respective interferogram.
Claims15
A method for measuring a surface, the method comprising:
- generating a laser beam;
- emitting the laser beam onto the surface;
- receiving at least a part of the laser beam, reflected by a respective point of the surface;
- generating an interferogram by superposition of the received laser beam with a reference laser beam for measuring a distance to a respective point based on a respective interferogram;
- and
- classifying the respective interferogram or a measured distance derived therefrom as non-valid or valid based on an evaluation of a phase change or an amplitude change of the respective interferogram.
3 more elements
An interferometric measuring device designed for measuring a surface, the device comprising:
- a laser for generating a laser beam;
- a drive for guiding a laser beam emitting measurement head above the surface such that the laser beam scans the surface point-by-point;
- a receiver for receiving at least part of the laser beam reflected by a respective point of the surface;
- an interferometer for generating an interferogram by superposition of the received laser beam with a reference laser beam;
- a signal processor for measuring a distance to a respective point based on a respective interferogram and classifying the respective interferogram or the measured distance derived therefrom as non-valid or valid based on an evaluation of a phase change or an amplitude change of the respective interferogram.
2 more elements
Dependencies are inferred from the claim text.