Method for producing inorganic oxide in form of thin film
AssigneeKao Corporation
InventorsRyo Onishi, Tsuyoshi Oda
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Abstract
Provided is a method for producing an inorganic oxide in the form of a thin film, the method including a step of bringing a first liquid and a second liquid into contact with each other, the first liquid having an inorganic oxide precursor dissolved therein, the second liquid phase-separating from the first liquid and having a substance dissolved therein, the substance reacting with the inorganic oxide precursor of the first liquid to form an inorganic oxide derived from the inorganic oxide precursor. The segment size of the first liquid at the time of contact between the first and second liquids is 500 μm or smaller.
Claims23
A method for producing an inorganic oxide in a form of a thin film, the method comprising
- providing a stream of a first liquid having an inorganic oxide precursor dissolved therein,
- providing a separate stream of a second liquid having a substance dissolved therein, the substance reacting with the inorganic oxide precursor of the first liquid to form an inorganic oxide derived from the inorganic oxide precursor, and
- bringing said first liquid and said second liquid into contact with each other,
- wherein a segment size of a cross-section perpendicular to a flow direction of the first liquid at a time of contact between the first and second liquids is maintained at 500 μm or smaller, thereby providing an inorganic oxide in the form of a thin film having an average thickness of 0.01 μm or larger and 1.5 μm or smaller.
A method for producing an inorganic oxide in a form of a thin film, the method comprising
- providing a stream of a first liquid having an inorganic oxide precursor dissolved therein, providing a separate stream of a second liquid having a substance dissolved therein, the substance reacting with the inorganic oxide precursor of the first liquid to form an inorganic oxide derived from the inorganic oxide precursor, and
- bringing said first liquid and said second liquid into contact with each other,
- wherein a segment size of a cross-section perpendicular to a flow direction of the first liquid at a time of contact between the first and second liquids is maintained at 500 μm or smaller, thereby providing an inorganic oxide in the form of a thin film, and
- wherein a ratio of an average longitudinal diameter to the average thickness of the inorganic oxide in the form of the film is 5 or more and 2000 or less.
Dependencies are inferred from the claim text.