Resist composition, method of forming resist pattern, polymeric compound, and compound
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakuya Ikeda, Masatoshi Arai
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Abstract
A resist composition including a resin component having a structural unit derived form a compound represented by formula (a0-1) (in the formula, W represents a polymerizable group-containing group; Ra01 is a group which is bonded to Ra03 to form an aliphatic cyclic group, or bonded to Ra04 to form an aliphatic cyclic group; Ra02 represents a hydrocarbon group which may have a substituent; Ra03 is a hydrogen atom or a monovalent organic group in the case where Ra01 is not bonded thereto; Ra04 is a hydrogen atom or a monovalent organic group in the case where Ra01 is not bonded thereto; and Ra05 to Ra07 each independently represents a hydrogen atom or a monovalent organic group).
Claims4
A compound represented by general formula (a0-1-1) or (a0-1-2) shown below:
- wherein, in formula (a0-1-1), Rα represents a hydrogen atom, a methyl group or a trifluoromethyl group;
- Va0 represents a linear or branched alkylene group which may have an ether bond;
- na0 represents an integer of 0 to 2;
- na011 represents an integer of 1 to 4;
- Ra02 represents a hydrocarbon group which may have a substituent;
- Ra030 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms;
- Ra050 to Ra070 each independently represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms;
- in formula (a0-1-2), Rα represents a hydrogen atom, a methyl group or a trifluoromethyl group;
- Va0 represents a linear or branched alkylene group which may have an ether bond;
- na0 represents an integer of 0 to 2;
- na012 represents an integer of 1 to 4;
- Ra02 represents a hydrocarbon group which may have a substituent;
- Ra040 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms;
- and Ra050 to Ra070 each independently represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms;
- provided that Ra02, Ra030, Ra060 and Ra070 are not bonded to each other.
Dependencies are inferred from the claim text.