Evaporation apparatus for depositing material on a flexible substrate and method therefore
AssigneeApplied Materials, Inc.
InventorRoland Trassl
Life of this patent
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AssigneeApplied Materials, Inc.
InventorRoland Trassl
Estimating the term…
An evaporation apparatus (100) for depositing material on a flexible substrate (160) supported by a processing drum (170) is provided. The evaporation apparatus includes: a first set (110) of evaporation crucibles aligned in a first line (120) along a first direction for generating a cloud (151) of evaporated material to be deposited on the flexible substrate (160); and a gas supply pipe (130) extending in the first direction and being arranged between an evaporation crucible of the first set (110) of evaporation crucibles and the processing drum (170), wherein the gas supply pipe (130) includes a plurality of outlets (133) for providing a gas supply directed into the cloud of evaporated material, and wherein a position of the plurality of outlets is adjustable for changing a position of the gas supply directed into the cloud of evaporated material.
An evaporation apparatus for depositing material on a flexible substrate supported by a processing drum, the evaporation apparatus comprising:
An evaporation system comprising an evaporation apparatus and an oil printing module configured for printing a patterned oil layer on a flexible substrate, the evaporation apparatus being an evaporation apparatus for depositing material on a flexible substrate supported by a processing drum, the evaporation apparatus comprising:
An evaporation apparatus for depositing material on a substrate, comprising:
Dependencies are inferred from the claim text.